ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

7ND9071en

When ordering spare parts, always include the following information: Valve controller type designation and serial number from the ID plate The code of this manual, the part number, the part name and quantity required 42 7 ND90 71 en 12 DRAWINGS AND PARTS LISTS 12.1 Exploded view ND9100, ND9400, ND7100 100 107 110 109 228 39 223 217 219 42 218 215 220 210 44 19 43 18 139 11 120 47 49 222

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-04ST AS221F-N01-09ST 18.5 15.2 25.3 32.4 5/16" 16 4 10.4 25.2 34.4 40 AS221F-02-06ST AS221F-N02-03ST 17.7 16 5/32" 10.4 25.2 34.4 17 6 12.8 R1/4 17 18.5 7 1.5 34.7 40 40.2 AS221F-02-08ST AS221F-N02-05ST 16.5 27.2 36.4 3/16" 12.8 25.2 34.5 8 18.5 15.2 42 17.7 42 40.2 AS221F-02-10ST AS221F-N02-07ST 18.3 17 NPT1/4 17.5 18.5 7 1.5 34.7 1/4" 13.2 25.2 34.5 35.3 44.5 10 21 18.5 44 AS321F-02-06ST

Fieldbus System

Series SI Unit common, End Plate type Valve stations 3 5 Power supply with M12 connector SI Unit common Power supply with 7/8 inch connector SY3000 SY5000 Stations Note Symbol 02 2 stations Nil Double wiring Note 1) Without SI Unit SI Unit Positive common SI Unit Negative common Type 16 02 2 4 3 5 16 stations 10 11 Side ported Bottom ported 2 stations Specified layout Note 2) (Available up

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

38.5 41.5 37.5 30.5 32.5 30 23.5 24 21 22.5 26.5 25.5 44 9 19.5 50 11 11.5 8.5 10 14 13 41 42 48 44.5 47.5 43.5 36.5 38.5 36 24 24.5 21.5 23 27 26 50 7 20 63 13.5 14 11 12.5 16.5 15.5 47.5 48.5 54.5 51 54 50 40 42 39.5 25.5 26 23 24.5 28.5 27.5 56.5 9.5 21.5 80 16.5 17 14 15.5 19.5 18.5 57.5 58.5 64.5 61 64 60 50 52 49.5 31.5 32 29 30.5 34.5 33.5 66.5 12.5 29.5 100 19.5 20 17 18.5 22.5 21.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

R)-M-C6/C8/C10/02 35.5 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 94.5 83 300 Indicator light 37 <42> < >: AC 4-14-10 11 3 Port Solenoid Valve Metal/Rubber Seal, Body Ported, Plug Lead Unit Manifold (Connector Kit) Series VQZ100/200/300 How to Order Manifold: VQZ100 V100 C D VV3QZ 1 2 08 SY SYJ Option Series VK None DIN rail mounting style (With DIN rail in standard length

REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2 stations N SD Note 2) SU Note 2) 11 11 stations W Note 1) Add 1 station for terminal block box mounting.

CL

11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63, #1 (#1+#11) CLAB80SCLA80, #1 (#1+#11) CLAB100SCLA100, #1 (#1+#11) MGF CY1 MY1 3.1

Table of Contents

Refer to page 8-11-96.

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(G) (Pitch) P = 10.5 12.5 Manual override 4 5 3.7 15.8 1.5 91.7 [96.1] 78.8 [83.2] 7 10 R P R R P R A A A A A 14 19.5 11 10 30.7 31.5 29 52.9 [55.1] 53.7 [55.9] B B B B B M5 x 0.8 (P, R port) 2-3.5 (For mounting) M3 x 0.5 (A, B port) L2 3.5 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + + 42 [49] 26.6 13.5 L plug connector (L) M plug connector (M) M8 connector (W0) (

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)