Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

Series IDG

and 50HM are 03 only.

VQZ1000/2000/3000

PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable

IR1000/2000/3000

2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge connection port G 43 74 130 22 SET Atmosphere VAC Vacuum

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Example: SS3YJ3-20-03 .1 pc. (Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

KR

Connection thread 26 23.5 8 17 15.2 18.5 26.3 18.2 11.1 3 8 KGD08-03 37.5 38.5 35 1 4 3 8 KGD10-02 KGD10-03 43 43.5 39.5 40.5 39 19 2-applicable tubing 10 40 21 12.8 40.8 29.0 18.5 26.5 1 2 KGD10-04 44 45 62 55 56 22 1 4 3 8 KGD12-02 KGD12-03 46.5 47 42 43 12 22 20.9 28.5 22 13.9 57.2 45.2 1 2 KGD12-04 46 48.5 63 Note) D: Max. diameter Reference dimensions after R thread installation

Speed Controller with One-touch Fitting

(43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 54 (53) AS421F-04-12(S)A

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

LEC-OM07605CN

PF_ _ ]). 5-43 5.2.7 4([Pr.

CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

Compact Cylinder with Lock Series CLQ

(mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

ZP

Applicable for the ZP series adapter How to Order ZP2 03 U N Pad unit Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 03 B04 05 06 B06 07 B08 N S U F GN GS 3 4 5 6 6 7 8 Blast type: Work pieces can be removed easily.

V

Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

wire length) 300 101.5<102.5> 65<66> Indicator light 77 114 62<67> < >: AC 1.12-43 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ3000 2 position double 0 1 02 03 Grommet(G): VQZ325 (R)lGl 300 116.5 (Lead wire length) 58 28 24.5Mounting holes 10.5(Rc(PT)3/8) 10.5(Rc(PT)3/8) 9(Rc(PT)1/4) 9(Rc(PT)1/4) R5 5 A 4 B 2 18 45 SMC SMC B A 5 1 P 3 R1 R2 Manual override Cover diameter 1.6 Cross section