Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

Compact Hydraulic Cylinder

(Tightening torque of M3 screw: 0.5 to 0.7 Nm) 8.

HRX-OM-S004

Circulating fluid temperature: 31 This product Users equipment Serial communication Fluid discharge temperature: 31 Circulating fluid display temperature Heat 31 dissipation 1 Circulating fluid set temperature 30 Offset temperature 30 1 HRS Series 5.9Offset function 5-23 HRX-OM-S004 Chapter 5 Display and setting of various functions When only the "displayed circulating fluid temperature

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

CQ2

Bolt M3 X 40 l 2 pcs.

PA300/500/700

VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

IDG

Construction Refer to pages 14-19-30 to 31.

Vacuum

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A

Vacuum

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A

Secondary Batteries

Applicable bore size Description Size Quantity Part M3 x 0.5 x 6L 1 20, 25 Auto switch mounting screw M3 x 0.5 x 8L 1 BBA2 M3 x 0.5 x 10L 1 32 to 50 1 20, 25 Auto switch mounting nut (square) M3 x 0.5 M3 x 0.5 1 32 to 50 Auto switch mounting nut (convex) Note 3) A spacer (black resin) for BQ-2 is not included.

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

VZ100/300/500

01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5

7.4

An M3 port will be installed on the top side of the manifolds SUP/EXH block. How to Order Valves (Example) S0712 R -5G-C4 External pilot port (M3 x 0.5) External pilot Note 1) The dual 3-port valve is not available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <