ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

VQC

20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Table of Contents

Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

Compact Manifold Regulator

11.5 19 19 20 8, 5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Compact manifold regulator ARM5 Series

6 11.5 38.5 1/4 3 12.5 19 35.5 8, 5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

tubing O.D.: 4, 6, 8, 1/4" 28 28 [mm] Model A C P PF2M701/702/705/710L -C4(-L) 84.4 7.6 2.8 depth 8.4 8 8 PF2M701/702/705/710/ 725/750L-C6(-L) 84.4 8 2.8 depth 8.4 2 x P 2 x P PF2M725/750L-N7(-L) 84.4 11.8 2.8 depth 8.4 PF2M711/721L-C8(-L) 88 12 2.8 depth 6.2 PF2M711/721L-N7(-L) 88 10.3 2.8 depth 6.2 19 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7m-m1/2(-L) 48 A

modular-press-e

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.

Table of Contents

Refer to pages 11-4-18 to 11-4-19 for details of made-to-order specifications.