Table of Contents

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

Shock Absorbers and Rate Controls

(iltodel) (rtolog l,lo, (lttodel) I ( t) t t( l(r wf wt ryrrl t44 162 58 l3l4-12 l.lN 38 44 TI 5l 't0 LR0EMrAxl 144 162 58 t3la.12 UN l 3 38 44 92 23 5l l0 0t[%r2 195 213 58 l3/+12 UN l 3 38 44 8 23 LR0tIUl316x2 t95 213 58 l314-12 U t3 38 44 | 8 23 2l 5l t2 0t r/x3 216 264 58 Ir7r.12lJti t3 38 44 143 23 2t 5l t 2 LR0E[tl%xl 1 7 5 r93 77 2'lz l2 UN t9 50 57 l t 4 26 26 70 l2 lEfill7sr2 225

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

SQ1000/2000

A port 10 Example) SQ1141-5L-C6-A (N.O. specification) A port plug O-ring Example) SQ1141-5L-C6-B (N.C. specification) B port B port plug Example) SQ1141-5L-C6-B-M (B port plug with manifold block) Direct exhaust outlet with built-in silencer [-S] The exhaust outlet is placed on the top side of the manifold end plate. The built-in silencer provides highly effective noise reduction.

HRX-OM-X084

/min) / 0.11(at 5L/min) Pump capacity (50/60Hz) For option T10.35(at 5L/min) / 0.35(at 5L/min Rated fiow (50/60Hz) 7 L/min 5 / 5 For option T15 / 5 Flowdisplay range21 L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating20 m 35 Bypass

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.

PSE550/300

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

ZSE30A(F)/ISE30A

One-touch fittings 6 mm straight One-touch fittings 1/4 inch straight One-touch fittings 4 mm elbow One-touch fittings 6 mm elbow One-touch fittings 1/4 inch elbow 4 cores, for 2 outputs, 2 m Mounting screw (with 2 pcs. of M3 x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Table of Contents

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Mechanical Valves Series NVM, NVFM, NVZNI

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

IIIIIII

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

Digital Flow Switches, Series PF2A, Series PF2W

/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range

PA3000/5000/PAX1000

Calculation of diaphragm life Example 1) Discharge rate 5l/min, when operating 8h/D (for PAX1000) 5 0.021 238 (cycles/min) = = Cycles per minute Discharge rate Discharge per cycle 1 60 = x x 1 8 (daily operating time) Reference life cycles Cycles per minute Service life 1 60 = 1 8 50,000,000 238 x x 437 days = Example 2) Discharge rate 5l/min, when operating 8h/D (for PA3000 automatically

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa *1 Can be switched to auto-shift or copy function r Piping specification t Option 1 y Option 2 Symbol Description Symbol Description Nil Without lead wire Symbol Description Nil None M5 female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD How to Order Valve Manifold Assembly (Example) U side VQZ2150-5L Stations VQZ2250-5L VQZ2350-5L D side VV5QZ25-05C6C1 set (C kit 5 stations manifold base) VVQZ2000-10A-51 set (Blanking plate assembly) VQZ2150-5L1 set (Single solenoid part no.)

Proposals for Energy Saving

Air operated type 2 Applicable series Symbol 03 Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l