Aluminum High Vacuum Angle Valve Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.
Foot Female head side clevis (for ES accessory) Angled head side clevis with ball joint Angled head side clevis L DS ES E CS1 C76 Bore size (mm) C85 C95 Supplied with two pieces CP95 32 L5032 DS5032 E5032 ES5032 NCM 40 L5040 DS5040 E5040 ES5040 50 L5050 DS5050 E5050 ES5050 NCA 63 L5063 DS5063 E5063 ES5063 80 L5080 DS5080 E5080 ES5080 D100 L5100 DS5100 E5100 ES5100 -X See page 6-13-10 and
side 70 4.5 2-Plug 12 18 36 40 (Digonal47) Basic type: RSH20-15ll SRSH20A, #1 (#1+#5) With locking mechanism: RSH20-15ll-D SRSH20A, #2 (#2+#5) With cancel cap: RSH20-15ll-C SRSH20A, #3 (#3+#5) With lever detection switch: RSH20-15ll-S SRSH20A, #4 (#4+#5) With locking mechanism + cancel cap: RSH20-15ll-DC SRSH20B, #1 (#1+#5) With locking mechanism + lever detection switch: RSH20-15ll-DS
Foot Female head side clevis (for ES accessory) Angled head side clevis with ball joint Angled head side clevis L DS ES E CS1 C76 Bore size (mm) C85 C95 Supplied with two pieces Supplied with 4 screws CP95 32 L5032 DS5032 E5032 ES5032 NCM 40 L5040 DS5040 E5040 ES5040 50 L5050 DS5050 E5050 ES5050 NCA 63 L5063 DS5063 E5063 ES5063 80 L5080 DS5080 E5080 ES5080 D100 L5100 DS5100 E5100 ES5100 -
Foot Female head side clevis (for ES accessory) Angled head side clevis with ball joint Angled head side clevis L DS ES E CS1 C76 Bore size (mm) C85 C95 Supplied with two pieces CP95 32 L5032 DS5032 E5032 ES5032 NCM 40 L5040 DS5040 E5040 ES5040 50 L5050 DS5050 E5050 ES5050 NCA 63 L5063 DS5063 E5063 ES5063 80 L5080 DS5080 E5080 ES5080 D100 L5100 DS5100 E5100 ES5100 -X See page 6-13-10 and
CA1-SO6 63 100 70 15 130 110 150 20 11 22 14 55 73 90 10 107 18+0.070 0 80 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 129 25+0.084 0 CA1-SO8 100 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 135 25+0.084 0 D I M E N S I O N S O F FS E T M O U N T I N G B R A C K E T Applicable bore size A B A+B+90 40 ~ 100 12 60 162 Applicable bore size (mm) Part No DA DL DU DC DX DE DO DR DT DS
MGPM, MGPL Common dimensions With double side scrapers Dimensions AW, EW, MT, DS (mm) (mm) For cylinder with double side scraper MT DS Bore size (mm) Bore size (mm) B FB AW FT EW MGPM 17 21 26 26 31 31 36 44 MGPL 15 19 21 21 26 26 31 36 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 63 63.5 69.5 76 82 87 106.5 126 16 16 20 20 22 22 28 35 74 74.5 82.5 89 95 100 120.5 143 5 5 6 6 6 6 6
VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz G Grommet Conduit terminal DIN terminal TL D T Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot. 4 Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS
Port size Symbol Port size Rated flow range 03 06 12 10 1 14 1 1/2 20 2 Output specification Symbol OUT FUNC*2 Applicable monitor unit model CS NPN Analog voltage output*3 External input*4 PFG300 series DS NPN Analog current output External input*4 PFG310 series ES PNP Analog voltage output*3 External input*4 PFG300 series FS PNP Analog current output External input*4 PFG310 series *2
S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.
S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light
8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.
S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.
flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1
flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1
U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 12 Series LEY Dimensions: In-line Motor Encoder Z-phase detecting position F1 Note 1) Rod operating range (Stroke + G mm) Z D T EV M J U 4 x O1 thread depth R M K Note 2) V W
1 I/O cable length [m]*3 Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver A1 LECSA1-S100 to 120 A2 LECSA2-S200 to 230 B1 LECSB1-S100 to 120 B2 LECSB2-S200 to 230 C1 LECSC1-S100 to 120 C2 LECSC2-S200 to 230 S1 LECSS1-S100 to 120 S2 LECSS2-S200 to 230 *3 When Without driver is selected for driver type, only Nil: Without cable can be selected.
Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m
Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer