Series: VQ2000, IN Port Size: 01 (Rc 1/8), OUT Port Size: 01 (Rc 1/8), Option: FN (F + N)

Series: VQ2000, IN Port Size: N7 (One-touch Fitting for 1/4"), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

Series: VQ2000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

Series: VQ2000, IN Port Size: N9 (One-touch Fitting for 5/16"), OUT Port Size: N9 (One-touch Fitting for 5/16"), Option: FN (F + N)

Series: VQ2000, IN Port Size: N7 (One-touch Fitting for 1/4"), OUT Port Size: N7 (One-touch Fitting for 1/4"), Option: FN (F + N)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: FN (F + N)

Series: VQ2000, IN Port Size: C8 (One-touch Fitting for ø8), OUT Port Size: C8 (One-touch Fitting for ø8), Option: FN (F + N)

High Vacuum L Type Valve

D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

/VQ20/VQ30 VALVE, 22, VQ1000 NO SIZE RATING, 0.14344 lb, ModelManifold pitch (mm)Flow-rate characteristicsApplicable cylinder bore size Metal sealRubber seal C [dm3/(s?

/VQ20/VQ30 VALVE, 22, VQ1000 NO SIZE RATING, 0.143 lb

VQ1000 NO SIZE RATING. 0.0992 lb. 22.

VQ1000 NO SIZE RATING. 0.13566 lb. 22.

VQ1000 NO SIZE RATING. 0.154 lb. 21.

SMC Pneumatic Clean Series

This does not apply to insert fittings (KF), miniature fittings (M, MS), clean one-touch fittings (KP,KPQ,KPG) and speed controllers with clean one-touch fittings (AS-FPQ/FPG). No dust is carried into the clean room. After inspection, products are blown with high purity air (clean bench/class M3.5) in a clean environment.

SMC Pneumatic Clean Series

This does not apply to insert fittings (KF), miniature fittings (M, MS), clean one-touch fittings (KP,KPQ,KPG) and speed controllers with clean one-touch fittings (AS-FPQ/FPG). No dust is carried into the clean room. After inspection, products are blown with high purity air (clean bench/class M3.5) in a clean environment.

SMC Pneumatic Clean Series

This does not apply to insert fittings (KF), miniature fittings (M, MS), clean one-touch fittings (KP,KPQ,KPG) and speed controllers with clean one-touch fittings (AS-FPQ/FPG). No dust is carried into the clean room. After inspection, products are blown with high purity air (clean bench/class M3.5) in a clean environment.