HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

CVRA1-E

(See Fig. 14.)

Air Slide Table Series MXQ

D-A9V Solid state switches D-F9 D-F9V 2 color indication solid state D-F9W D-F9WV MXQ 6 MXQL 6 6 MXQ 8 MXQL 8 8 MXQ12 MXQL12 12 MXQ16 MXQL16 16 MXQ20 MXQL20 20 MXQ25 MXQL25 25 Function Options Adjuster Options With Buffer Mechanism With End lock Protects work pieces and tools, etc., by eliminating impact at the end of the extension stroke Buffer unit is auto switch capable Holds

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

Rotary Actuator

Fig. (6) Flexible coupling 22 - Piping and operating direction Fig. (7) shows piping ports of the rotary actuator. Table (8) shows the port size. Rotation display plate Table (8) Port size Size Port size 30 M5 50 Rc1/8 63 Rc1/8 A Port 80 Rc1/4 100 Rc3/8 B Port Fig. (7) Port location A fixed throttle is installed inside the actuator port.

JXCx-OMY0004

Alarms and countermeasures" (P.66).) (5) (4) Fig.15.2 Display of [Diagnostics] screen -65No.

AC Servo Motor Driver

CN2 P S T Encoder USB D GND 7 8 MR MRR MD MDR 3 2 4 LG E M 3 49 3.

DOC1023125

Size Order No. 24 Return Plate Aluminum alloy Coating 25 LE-D-15-1 25 Cover plate Aluminum alloy Anodized 27 32 LE-D-19-1 26 Table spacer Aluminum alloy Anodized 40 LE-D-19-2 27 Belt Replacement parts/Grease pack Order No.

E-MY2B_E_A

(3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

HRX-OM-X010

C HRZ008-L-F 16 14 [HRZ008-L-F] 12 Cooling capacitykW 10 8 6 4 2 0 -20 -10 0 10 20 30 40 Circulating fluid setting temp.deg. C Fig. 8-4 Cooling capacity (HRZ008-L-F) *Common to 50/60Hz HRZ Series 8.1 Specification 8-7 8-7 HRX-OM-X010 Chapter 8 Appendix Fluid : Ethylene glycol solution 60% Flow rate : Rated flow Facility water temp. : 25deg.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(g) (mm) Body weight 100 160 Additional weight of magnet and rail 8 12 Model MXP8-10 MXP8-20 Model MXP8 Standard strokes 10, 20 Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV No. of auto switches mounted 1 pc. 2 pcs. 5 10 5 10 5 5 8-8-24 24 Air Slide Table Series MXP8 Table Deflection Table displacement due to pitch moment load Displacement

DOC1023126

8 or more EQY32 22 8 8 or more Thread depth of bracket *Rod end nuts are accessories. 16 - Mounting / Body bottom tapped style Model Bolt used Max. tightening Max. screw torque [Nm] depth [mm] EQY25 M50.8 3.0 6.5 EQY32 M61.0 5.2 8.8 Mounting/Rod side, Head side tapped style Head side Rod side EQY*D is excluded.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

3 5 VBUS LG 1 D USB 14 MO2 D 10VDC GND 11 LG Servo motor CN2 Encoder 7 8 MD MDR 3 MR 2 4 MRR LG E M Note 1.

ZSM1-115/121

ZSE ISE ZSP Fig. (2) Equivalent circuit of an NPN switch with the output off PS PLC Low level 12 to 24 [VDC] Main circuit of switch ISA Max. 80 [mA] Max. 30 [V] Load PSE Current flows. Load is powered. IS ISG Fig. (3) Equivalent circuit of an NPN switch with the output on ZSM PNP 12 to 24 [VDC] Fig. (4) shows an example of a PNP switch.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

121.5 110.5 95.5 80.5 Operating range Note) Operating range Note) 8 8 8 5.5 5 5 5 5.5 11.5 11.5 12 12 12 Operating range Note) Perpendicular electrical entry is not available for 50 and 63. ( ) D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV MY1CW25/32/40/50/63 B A Reed Switch Solid State Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y59 , D-Y69 , D-Y7P(

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

MY1

Operating range MY1MW (Slide bearing guide type) MY1CW (Cam follower guide type) (mm) (mm) Auto switch model Bore size Auto switch model Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 63 D-A9 D-A9 11 7.5 11 7.5 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-M9/M9V D-M9W/M9WV D-M9A/M9AV 7.5 7.5 8.5 8.5 9.5 7 6 7.5 7.5 7 8 8.5 7 6 D-Z7/Z80 D-Z7/Z80 12 12 12 11.5 11.5 12 12 12 11.5 11.5 D-Y59/Y69 D-Y7P

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For details, refer to page 8-30-31 to 8-30-32. D-A90 cannot be mounted on Series MY1HT. Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 Grommet (In-line) Grommet (In-line) Reed switch Without indicator light 8-12-24