ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W MSU Y = X = Long shaft side Long shaft side Long shaft side CRJ Long shaft side CRA1 X = CRQ2 Short shaft side Short shaft side Short shaft side MSQ Y = Y = Short shaft side MSZ Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) X 2 to 18 2 to 20 17 to 30 18 to 32 18.5 to 36 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 X 2 to 18 2 to 20

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

306 297 19 322 313 Port size 20 Stations 338 329 2 Stations 50 41 Stations n L1 L2 Onetouch fitting 682 Manifold specifications 10-SYJ500 Type 41 manifold: Side ported / 10-SS3YJ5-41Stations -M5, 01 [ ]: AC 1/8 Grommet (G) (Pitch) P = 16 18 (Pitch) P = 17 18 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 30 VDC + + Load Load 18 to 30 VDC U White N.C.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

18 3.75 4.03 3.75 4.03 0.86 0.38 0.624 1/4-28 0.50 0.95 0.62 0.250 MB1 088 (7/8") 0.34 0.75 0.250 0.75 5/8-18 0.50 5/8-18 3.31 3.59 3.56 3.84 0.93 0.38 0.624 1/4-28 0.50 0.95 0.62 0.250 106 (1 1/16") 0.12 0.34 0.88 0.250 0.75 5/8-18 0.25 0.50 5/8-18 3.84 4.12 3.97 4.25 1.12 0.38 0.624 5/16-24 0.62 1.17 0.62 0.312 CA2 125 (1 1/4") 0.25 0.41 1.06 0.250 0.75 3/4-16 0.38 0.75 5/8-18 4.47 4.87

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

GS: Grommet with PCB CS: Conduit 67 18 Applicable cable 6 to 12 55.3 G1/2 38 18 300 500 48.9 18 NPT1/2 47.4 45.9 44.3 DN: DIN terminal without connector WN: M12 connector 41.1 18 31.3 18 JSXD3104 Only the JSXD31 with port size of 04 (1/2) has threads on the bottom of the body. 47.4 46.2 2 x M4 x 0.7 Thread depth 8 Glossary of Terms 18 Specific Product Precautions 30 JSXD Series Dimensions

Battery-less

15 to 100 14 20 18 36 14.5 10 101 to 200 32 40 20 to 100 14 22 18 36 18.5 10 101 to 200 L CW CU RR +0.4 +0.2 CX 0.1 0.3 CZ Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Table of Contents

18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Micro Mechanical Valve Series VM1000

VH VHS 3 x 18 4 x 4.5 mounting hole T.T. 7 N F.O.F. VHS 60 Push button (Mushroom) VM430-01-30R/B/G/Y O.T. T.T. P.T. 40 Panel mounting hole 29.5 1.5 1.5 22.1 Max. 6 3 Symbol (104.6) (OUT) 2 (75.1) NC 10 12 53 13.5 18 4.5 36 13.5 18 VM4 SMC NO 3 (N.C.) 1 (N.O.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

shaft side 40 40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

CL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14 32 111 + Stroke 150 + Stroke Axial Foot Style (L) E D P CLJ2L1619 16 LOCK FREE 2 42 54 6 Silencer 12 Piping port M5 x 0.8 25.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

MY1

Hole sizes for centralized piping on the bottom WX 47 56 90 120 Y 15.5 15 45 50 S 14.5 18 d 10 10 18 18 D 17.5 17.5 26 26 R 1.1 1.1 1.8 1.8 Applicable O-ring Model MY1B 50G MY1B 63G MY1B 80G MY1B100G C15 P22 MY1B Bore size G SMY1B Bore size , #2 (#2 + #6) 16 Mechanically Jointed Rodless Cylinder Series MY1B 1 in = 25.4 mm Dimensions (mm) Side Support Side support A MY-S A 2-G 2-H F E C

JA/JAH/JB/JS

18 20 21 23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

JA/JAH/JB/JS

18 20 21 23 25 29 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

Compact Manifold Regulator

(Full Span) Display accuracy 230 Calibration angle Limit indicator With limit indicator 17.5 L side end block R side end block 6 28 OPEN 56 SMC 56 1.5 SMC 28 20 7 7 20 R E V 18 O 26 26 18 C 22 32.5 32.5 14.5 Port Plug Bushing VVQ0 58A Part no.