A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(M): SYJ7140lMll01 02 01 02 VZS VFS 2-4.3 2-4.3 (Mounting holes) (Mounting holes) VS A B B A 34 27 34 27 B VS7 A A B R2 R1 P R2 R1 P 85.5 [86.8] 81.5 64.3 34 8.5 34 8.5 64.3 (Lead wire length) 300 (Lead wire length) 95.1 300 (P, A, B port) 3-Rc(PT)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 54 60 71.1 [77.6] 25.5 41 47.6 54 60 [66.5] 11.5 12 20 57.1 20 57.1 11.5 12 (R1, R2 port) 2

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130 (3 Position) 300 (Lead

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

52-SY7140 (R) -TTMax.10 02 03 L 135 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation

Rubber seal 5 Port Solenoid Valve Series SYJ7000

A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

When a 3 port valve is mounted on a 5 port manifold, The "A" port is the working port. The "B"port can either be plugged or unplugged.

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

4/5 Port Air Operated Valve Series SYJA3000

Valve mounting direction Stations 02 Single solenoid coil is on opposite side as the A, B port. 2 stations Nil + + A + + + + + : : R P P R R port M5 x 0.8 R port M5 x 0.8 Single solenoid coil is on same side as the A, B port.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port} VQZ200 VQZ300 Symbol Port size V100 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 SY Type of actuation SYJ (A) 2 N.C.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

A

, d e t e r i o r a t i o n o f a c c u r a c y, a n d breakage of parts.)

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

Smooth Cylinder/Low Speed Cylinder

A B A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

AC Servo Motor Driver (Pulse input type/Positioning type)

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

Tie-rod Type Hydraulic Cylinder

MA a CHM A MA a Cushion adjustment screw Air release R (max.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5/B64 D-G5/K59 D-G5W/K59W (A set of band and screw) BA-02 BA-01 (A set of band and screw) BA-32 (A set of band and screw) BA-04 (A set of band and screw) BA-05 (A set of band and screw) BA-06 (A set of band and screw) BA-08 (A set of band and screw) BA-10 (A set of band and screw) Note) Since the switch bracket (made from nylon) are affected in an environment where alcohol, chloroform,