MLGP

weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100

MLGP

weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100

MLGP

20 20 20 20 20 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP 50 RLQ 50, 63 50, 63 Load weight m (kg) 50, 63 MLU 10 10

MLGP

Lock Series MLGP Horizontal Mounting (Ball bushing bearing) (31) l2 = 50 mm V = 400 mm/s (32) l2 = 100 mm V = 400 mm/s MLGPL20/25 MLGPL20/25 4 4 25 25 25 25 25 CL 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) CL1 MLGC 20 20 20 20 20 20 CNG MNB CNA 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications. Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.

VFS

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Vacuum System Peripherals:

Series ZM 13-14-20 4.

HEC-OM-S008

Host ENQ 32H Check sum CR (H) (L) Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data.

A_HEC-OM-J017

Host ENQ 32H Check sum CR () () Thermo-con STX 32H Internal sensor ETX Check sum CR 101 100 10-1 10-2 () () Host ACK CR (Possible to omit) Note2DH is entered in 101 digit is attached to temperature data.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

5

45 50 12 37 43 50 57 63 70 16 49 57 66 74 83 92 20 75 88 101 114 127 140 153 165 178 191 REA 25 109 125 140 156 172 188 204 220 236 252 REB Weights/With Auto Switch (Built-in magnet) (g) Bore size (mm) Cylinder stroke (mm) 5 10 15 20 25 30 35 40 45 50 REC 12 45 51 58 65 71 78 Smooth Smooth 16 59 67 76 85 94 103 20 106 119 132 145 157 170 183 195 208 221 Low Speed 25 151 167 183 199 215 231

MY1

20 20 1.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

SX

-05DRS-C6 20 20 stations For special specifications, indicate separately by the manifold specification sheet.

Compact 5-Port Solenoid Valve

FREE LOCK FREE LOCK Applicable connector: 20 pins MIL type (Conforming to MIL-C-83503) Applicable connector: 10 pins MIL type (Conforming to MIL-C-83503) n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 236 245 254 263 272 281 290 299 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable