3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

PSE540/560

ZSE ISE PSE Z I SE3 Sensor 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range PS 101 kPa 0 kPa PSE541 PSE561 Z I SE1 2 For vacuum Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 101 kPa 10 kPa ZSP 100 kPa 100 kPa For compound pressure PSE543 PSE563 ISA2 101 kPa 101 kPa

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Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

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Rod Couplers Part # Rod Thread DMA-312 5 16-24 DMA-375 38-24 DMA-437 7 16-20 DMA-500 12-20 The Table on the right shows the Rod Couplers that offers. The thread shown is a male / female thread as the coupler has both a male and female end.

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 35 35 40 40 to 500 to 600 to 600 to 750 to 750 27 32 32 37 37 22 27 27 32 41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 44 52 64 78 92 60 70 86 102 116 71 81 101 119 133 16 20 20 25 30 96 108 115 129 140 32 40 40 52 52 10 10 10 14 14 60 70 86 102 116 9 9 11.5 13.5 13.5 12 12 15 18 18 80 90 105 130 150 42 50 59 76 92 100 110 130 160 180 85 95

PSE530/200

Pressure Sensor/Sensor Range ZSM Sensor supply pressure 101 to 101 kPa (Compound pressure) (Vacuum) (Low pressure) (High pressure) PF2 PSE533 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor IF SET If the controller is equipped with a unit switching function, unit setting can be changed.

MB

20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A5 D-A6 (n2) 2 (n2) 2 (n2) 2 20 + 55 n = 2, 4, 6, 8 15 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 +

10

25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230 250 270 290 310 Note) ZZ indicates dimensions for double side rod boot.

MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to

70astamb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

mb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Square Tube Type Air Cylinder Series MB1

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Size Lead Order no. 16 Wear ring holder Stainless steel Stroke 101 mm or more 20 25 LE-D-2-2 20 63 A/B/C LE-D-2-5 17 Wear ring POM Stroke 101 mm or more 32 LE-D-2-4 L LE-D-2-6 18 Screw shaft pulley Aluminum alloy 740 Electric Actuator/Rod Type LEY Series AC Servo Motor 25, 32, 63 Size Dimensions: Motor Top/Parallel X Encoder Z-phase detecting position W ZZ F1 Rod operating range Note 1) (

PSE550/300

Note 3) The following units can be selected with unit conversion function: For vacuum & compound pressure: kPakgf/cm2barpsimmHginHg For positive pressure & low pressure: MPakPakgf/cm2barpsi For low differential pressure: kPammH2O Analog Output 1 to 5VDC 4 to 20 mADC A B Rated pressure range Range 101 kPa 0 0 to 101 kPa For vacuum Analog output [mA] 5 20 For compound pressure Analog output

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

MLGP

weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100

MLGP

weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100