C85

30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54

A

84 66 30 36 21 16 112 23 19 224 55.5 56.5 62 M14 x 2 28 M14 x 2 3/8 40 Bore size Q R S T TA TB V W X YY YL Z 12 14 48 22 56 2 5 40 5 50 M4 x 0.7 7 12 16 16 52 25 62 2.5 5.5 42 7 54 M5 x 0.8 8 13 20 18 60 30 72 2 4 52 10 64 M5 x 0.8 8 13 25 26 70 38 86 2 2 62 10 76 M6 x 1.0 9 14 D I M E N S I O N S MGQ A C T U AT O R 32 30 96 48 112 2 1 80 5 100 M8 x 1.25 11 16 40 30 106 48 122 2 1 90 10 110

CQS

Model C D 30 35 30 35 35 40 40 45 Mounting bolt M3 x 30l x 35l M3 x 30l x 35l M5 x 35l x 40l M5 x 40l 45l CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S Example) Bolt M3 x 30l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend D 30 35 30 35 35 40 40 45 Model C Mounting bolt M3 x 30l x 35l

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16) 12 14 18 25 30 32 40 50 24 M5 x 0.8 69(77) 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 C76 30 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 29 M5 x 0.8 69(77) 25 Up to 300 301 to 400 25 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 35.5 Rc 1/8 71(79) 28.5 Up to 300 301 to 450 20 C85 27 26 10(13)

Micro Mechanical Valve Series VM1000

5, Width across flats 17 OFF ON R port (3 port only) (72.7) 42.7 30 24 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 17 44 25.4 10.5 12 10 2 x 4.6 mounting hole 1 (P) 3 (R) Panel mounting hole 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 13 N T.T. 60 Max. 6 Push button (Mushroom) VM122-M5-30 (R, B, G, Y) A VM132-M5-30 (R, B, G, Y) A 40 T.T. (81.6) (52.1) 29.5 22.1 3 30 10.5 1.5

MG

(Except D-P5DW) Cylinder stroke (mm) Bore size Refer to Standard Stroke on page 8-19-9. 40 50 63 80 100 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 12 mm 16 mm 20 mm 25 mm 32 mm Thread type M5 x 0.8 Rc NPT G N TF Nil For bore sizes 12 and 16, M5 x 0.8 is only available. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Hydraulic

x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 30 20 24 M39 x 1.5 31.5 +0.1 0 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 25 26 M48 x 1.5 40 H +0.4 +0.1 D +0.07 0 M5 x

0.4

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Electric Actuators

Motor side 16 pulse End side 1 A Parameter no.

Hygienic Design Cylinder Series HY

15 M10 x 1.5 depth 15 M16 x 2.0 depth 21 M20 x 2.5 depth 27 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3M, m3 MY3M, M1 MY3M, M2 MY3M, M3 500 400 300 100 100 200 100 50 40 30 50 40 30 200 50 40 30 100 20 20 63 50 40 30 20 10 10 Load weight (kg) Moment (Nm) Moment (Nm) Moment (Nm) 63 63 63 q 10 5 4 3 e w 20 40 5 4 r t 40 5 4 40 40 3 10 2 3 2 5 4 3 1 2 25 25 25 25 1 1 0.5 0.4 0.3 2 16 16 0.5 0.4 0.3 16 0.5 0.4 0.3 16 1 0.2 0.2 0.2 0.5 0.1 100 200 400 500 1000 1500

24

and 16, M5 x 0.8 is only available.

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

Dual Rod Cylinder Series CXSJ/CXS

ZZ CXSW32 S SS 16 14 14 16 Z (30) 8 8 30 38 2 x R3.5 2 x 6.9 through 8 36 1 2 x 11 counterbore depth 6.3 76 6.3 5 1 98 75 0.2 75 0.2 44 96 16 18 8 2 x R3.5 CX2 2 x 2 x M6 x 1 (Through-hole) CXW 4 x M5 x 0.8 thread depth 8 (Z) (30) 30 2 x 4 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) (mm) 11.5 19 CXT Z ZZ SS S Model CXSW32-10 CXSW32-20 CXSW32-30 CXSW32-40 CXSW32-50 CXSW32-75 CXSW32

F

16 2.5 5 4 1/4 KQH04-02S 14 21 15 16 5.6 5.6 16 5/32 1/16 KQH03-33S 11.11 22 18 16 3 7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17 4 4 9 5/32 1/8 KQH03-34S 11.11 22 18 16 3 9 6 1/8 KQH06-01S 12 22.5 18.5 17 13.1 13.1 10 5/32 1/4 KQH03-35S 14.29 21 15 16 3 16 6 1/4 KQH06-02S 14 23 17 17 13.1 13.1 15 3/16 1/8 KQH05-34S 12.7 22 18 16 3.5 11 6 3/8 KQH06-03S 17 23 16.5 17 13.1 13.1 27 3/16 1/4 KQH05-35S

Stability of suction position,

16 16 8.5 8.5 8.5 M8 x 1.25 14.5 M8 x 1.25 14.5 M8 x 1.25 14.5 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 9.5 9.5 5 9.5 23 52.6 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Width across flats 6 Seal washer Width across flats 6 26.5 56.1 Seal washer Width across flats 6 21 50.6 40 31 31 34.5 7 38 10 32.5 5 54 50 37 16 6 44 40 29.4 6

MGP

16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0