4/5 Port Solenoid Valve

double 3 position 2 position single Note 1) Pilot pressure range MPa 2 position double 3 position Ambient and fluid temperature C 10 to 50 (No freezing.

Modular F.R.L. Unit

AC40D C D E G 1 2 3 6 8 C J N R W Z AC10A AC25C AC60 AC40A AC40C AC20A Float type auto drain (N.C.)

Air Cylinder

J C CB CD CW L KK ZD B D LR R E WF A P M F AA Bore (in) XD MM EE LF 1/4-28 0.3 1.71 1.26 1.1 3/4 3/8 1/2 1/2 3/4 7/16-20 6 1/4 1 1/8 9/16 5/8 1.43 2 1 3/4 2.36 1/2 3/8 2.02 150 (1.5") 5 3/4 5/8 3/8 3 5/8 5/16-24 0.3 1.71 1.26 1.06 3/4 3/8 1/2 1/2 3/4 7/16-20 6 1/4 1 1/8 9/16 5/8 1.84 2 1/2 1 3/4 2.4 1/2 3/8 2.6 200 (2") 5 3/4 5/8 3/8 3 5/8 5/16-24 0 1.75 1.3 1.06 3/8 3/4 1/2 1/2 3/4 7/16-

Electric Actuator

Cable length (L)[m] 1 3 5 8 A B C (30.7) (16.6) (23.7) Connector A1 (12.7) (10.2) (5.6) (10.5) 1.5 3 5 8 (7.0) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 (30.7) (11) L Produced upon receipt of order (14.7) (10) Connector D Connector B With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1

HRX-OM-X010

Name of Each Section . 2-1 2.1 Name of Each Section (1) . 2-1 2.2 Name of Each Section (2) . 2-2 Chapter 3 Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 HRZ Series TOC-1 HRX-OM-X010 Table of Contents 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation location and maintenance

ZP

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With

CQ2

2 !3 !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Air Cylinder

+ 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting D-H7/H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6)3 60 + 22.5 (n 2) (n = 2, 3, 4, 5) CM3 CG1 D-C7 D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6)3 50 + 20 (n 2) (n = 2, 3, 4, 5) CG3 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6)3 50 + 27.5 (n 2) (n = 2, 3, 4, 5) JMB D-M9V 5 5 10 + 10 (n

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

AC

, 3/8, 1/2, 3/4 Easy maintenance.

7

2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Solenoid Plug-In Factor Time (ms) 3/8 Single NVFS4100 3.3 40 or less 2 Position 1/2 6 3/8 Double NVFS4200 3.3 15 or less 1/2 3.6 3/8 Closed NVFS4300 2.8 50 or less 1/2 Center 3 3/8 Exhaust NVFS4400 2.8 50 or less 3 Position 1/2 Center 3 3/8 Pressure NVFS4500 3.2 50 or less 1/2 Center 3.4 3/8 Perfect NVFS4600 1.7 55 or less 1/2 (Double Check) 1.8 T E C H N I C A L SPECIFICATIONS O P T I O

10

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

NCM

Standard Stroke (inch) Mounting Max. stroke as standard Note 2) Standard stroke 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 Long stroke -X142US Note 3) Front nose mount (B) 12 32 32 12 12 40 Rear pivot mount (C) 40 Double end mount (E) 40 20 Block mount (R) Note 3) Double rod (W) Note 3) Note 1) Minimum stroke for mounting

NCQ8

4-1/8 1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 3-3/8 3-5/8 3-7/8 4-1/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 3-1/2 3-3/4 4 4-1/4 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 4-1/4 4-1/2 4-3/4 5 0.19 0.33 0.25 0.21 0.39 0.27 0.45 0.27 27 Series NCQ8 Mounting Bolt Size for NCDQ8B056 to 250-T (With Auto Switch) (Inch) Model D C Bolt size Model D C Bolt size NCDQ8B056-025T 037T 050T 062T

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

Vacuum Pad

3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5