I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

5 Port Air Operated Valve Series VFA3000 1

8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Manual override R1 R2 P 8.5 34 2-4.3 (For mounting) 128.8 [131] 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable O.D. 3.5 to 7

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

HEC-OM-S008

01 03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids possible) 16 08 16 stations 8 stations Note 1) Double

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Applicable tubing: Inch sizes standardized Inch sizes are now available for all models. 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 6 8 10 4 AS121FM-M5 AS131FM-M5 M5 x 0.8 AS221FM-01 AS231FM-01 R 1/8 AS221FM-02 AS231FM-02 R 1/4 AS121FM-U10/32 AS131FM-U10/32 10-32 UNF AS221FM-N01 AS231FM-N01 NPT 1/8 AS221FM-N02 AS231FM-N02 NPT 1/4 Specifications Fluid Air AS Proof pressure 1.5 MPa Max. operating

0.4

(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Manifold Plug-in unit 1 Stations 02 2 stations 16 Note) 16 stations Mixed size for different types of piping, option installed Note) Refer to page 562 for details. Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Manifold Plug-in unit 1 Stations 02 2 stations 16 Note) 16 stations Mixed size for different types of piping, option installed Note) Refer to page 562 for details. Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

3 Port Air Operated Valve Series SYJA300

SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O. Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Modular Type Regulator Series AR

Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Name plate and pressure gauge in imperial units (PSI, F) When more than one specification is required, indicate in ascending alphanumeric order.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664