Ozone Resistant

80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Modular Type Filter Regulator Series AW

06 0.25 0.25 0.25 Set point Set point Set point Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.2 0.15 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa Inlet pressure MPa AW40 AW20 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2

Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

Air Pilot Operated Series NVSA

: : ' : ' r : : 1 1 ' . ' , ' , ' . ' , ' , , : , . ' , , ' , ' , , 1 1 1 ' , I , ' , ' ' ' ' @-g'.ttr' SMC Pneumatics. Inc" Air PiSot tlperated Series HV$A ,3f .,'5.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-21-1A 02 2 stations -+ -+ A : : B B R port 1/4 R P 20 20 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A Applicable individual SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5

VSA4

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AMR3000 to 6000 Series How to Order Adapter Assembly (Part number for one piece) 03 AMR 4 0 00 02 E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

VQC

spacer with residual pressure release valve VVQ4000-25A-1 Interface regulator (A regulator) ARBQ4000-00-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

HRX-OM-M090

HRX-OM-M090 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety