VFS

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

Table of Contents

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

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P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

VQ4000

Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1Individual EXH spacer VVQ4000-R-102 03 02 03 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-1 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ](1) Release valve spacer VVQ4000-24A-1D (1, 2) Double

LEC-OM07605CN

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.

VQ5000

spacer VVQ5000-P-1Individual EXH spacer VVQ5000-R-1EXH blocking plate VVQ5000-16A-2 03 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D

New

Other option Electrical option (Low concentration ozone resistant and applicable to deionized water/Oil-free/Port thread) Electrical options (Special voltage, with light) Specification Symbol Electrical entry Voltage Low concentration ozone resistant and applicable Symbol to deionized water (Seal material: FKM) Port thread Oil-free 1A 1B 1C 1U 1D 48 VAC Grommet 220 VAC 240 VAC A B C D E F

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 V ALM 1KM LER LEH 1KM 2KM 1SA 1Ry 1KM LEY -X5 1Ry : Relay 1PL : Indicator light 1SA : Surge absorber 2SA : Surge absorber 3SA : Surge absorber 1D : Flywheel diode 11LEFS 2SA 1QF : Molded-case circuit breaker 1FLT: Noise filter 1KM : Magnetic contactor (for control power supply) 2KM : Magnetic contactor (for main circuit power supply) 11LEJS 25A* For the LECYl2-V5, LECYl2-V7 and LECYl2-

Electric Actuator/Slider Type

Insulation resistance [M] 10 M (500 VDC) Weight [g] 900 1000 105 AC Servo Motor Driver Series LECY M U Power Supply Wiring Example: LECY LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection Three phase 200 V LECYM2LECYU2R S T 1QF 3SA U 1FLT V M 2KM W L1 L2 L3 1KM L1C L2C ENC +24 V 1Ry 1Ry (For servo alarm display) CN1 ALM+ B1/ 3 B2 B3 1PL 1 2 Servo power supply ON Servo power supply OFF 4 1D

7ND9071en

Comply with the requirements for FISCO field device II 1G Ex ia IIC T6...T4 Ga II 1D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db II 1 D Ex ia IIIC T90 C...T120 C Da II 2 D Ex ib IIIC T90 C...T120 C Db EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-26: 2007 EN 60079-31: 2009 EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-15: 2010 EN 60079-31: 2009 II 3 G Ex nA IIC

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

spacer VVQ5000-P-1Individual EXH spacer VVQ5000-R-1EXH blocking plate VVQ5000-16A-2 03 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D

Part Number Description: KV2 OTHER SIZE RATING    Product Line: C   Product Line Description: CONNECTORS    Family Code: 747   Family Description: KV2 FITTING    Class Code: 1D    Click here to report information errorImage shown may not match exact part number, FITTING, STRAIGHT UNION, CONNECTORS, KV2 FITTING, 1D

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: F (G), Voltage: 7 (240VAC 50/60HZ), Lead Wire: G (Grommet), Surge Suppressor: S (Surge Suppressor)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 1 (100VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: S (Surge Suppressor)

Compatible Fluid: -, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Driving Type: Pilot Type, Insulation Class: B, Voltage: 100 V AC 50/60 Hz, Sealing materials: NBR, Option: None, Body Material: CAC408, copper, Detailed

Compatible Fluid: -, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Driving Type: Pilot Type, Insulation Class: B, Voltage: 110 V AC 50/60 Hz, Sealing materials: NBR, Option: None, Body Material: CAC408, copper, Detailed

Compatible Fluid: -, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Open, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Driving Type: Pilot Type, Insulation Class: B, Voltage: 24 V DC, Sealing materials: NBR, Option: Surge voltage suppressor / With light, Body Material: CAC408