SMC Corporation of America
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623 608 Process Pump Automatically Operated Type/Air Operated Type PAF Series Dimensions: Automatically Operated Type (PAF3000 Series) Female thread: PAF341003 N03 F03 152 Reset button 139 2 x M5 x 0.8 Thread depth 9 PA PA(P) 139 114 19 95 PAX PB PAF PAF 4 x 7 mounting hole (Option is selected) Bottom view of body Air operated reset port Rc, NPT, G 1/8" PA PB FLUID OUT Rc, NPT, G 3/8" (102

Formula: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (Maximum 24 stations) SQ n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 297 286.5 276 265.5 255 244.5 234 223.5 213 202.5 192 181.5 171 160.5 150 139.5 129 118.5 108 97.5 87 76.5 66 55.5 VFS 354 343.5 333 322.5 312 301.5 291 280.5 270 259.5 249 238.5 228 217.5 207 196.5 186 175.5 165 154.5 144 133.5 123

Bore size (mm) 6 10 16 Basic style Axial foot style Rod side flange style Double Mounting 15 stroke 11 28 63 clevis style 30 stroke 16 35 80 Mounting nut Standard equipment Option 45 stroke 18 44 102 Rod end nut 60 stroke 23 53 124 Basic weight Clevis pin 75 stroke 145 Single knuckle joint 100 stroke 188 Double knuckle joint 125 stroke 224 T-bracket 150 stroke 250 Pin and snap

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

(g) 6 10 16 Bore size (mm) Mounting Basic Axial foot Front flange Double clevis 15 Stroke 11 28 63 30 Stroke 16 35 80 Mounting nut Standard Option 45 Stroke 18 44 102 Rod end nut 60 Stroke 23 53 124 Basic weight Clevis pin 75 Stroke 145 Single knuckle joint 100 Stroke 188 Double knuckle joint 125 Stroke 224 T bracket 150 Stroke 250 Double clevis or double knuckle joint are packaged with

DIN terminal: VZS2650-D(Z)-01 M plug connector: VZS2650-M(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX.10 156.5 300 (Lead wire length) 72.5 With light/surge voltage suppressor With light/surge voltage suppressor Pg7 109.5 102 Other dimensions are the same as the grommet type.

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

Filter case Filter element (ZR1-FZ) Vacuum switch Gasket slot Filter gasket Filter block 13-3-18 18 Series ZR Large Size Vacuum Module: Ejector System Dimensions: ZR1-F Circuit diagram ZR1-FE Spacer A 24.5 2Slitted hole (Mounting hole)1 43 10 23 102 232 102 Indicator light (Red) ZX Vacuum pressure setting trimmer 8 28 Vacuum switch Thickness 1.2 ZR 671 571 31 Spacer A is used to leave space

-4-C10(-S) SUP block plate SSQ1000-B-R Blanking plug KQ2P-04/06/08/10 Dual flow fitting SSQ2000-52AP. 101 P. 98 P. 100 P. 102 C10 N11 P R D side U side Port plug VVQZ2000-CP Silencer (for EXH port) Individual SUP spacer SSQ2000-P-4EXH block plate SSQ2000-B-R P. 102 P. 98 P. 100 P. 101 C8 L8 P R D side SMC AN200 U side Individual EXH spacer SSQ2000-R-4Special wiring specification (-K) Back

Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1.2-23 Series SYJ3000 31 Type Manifold: Side Ported/SS5YJ3-31Station -M3 Grommet (G), (H) 4-M5 X 0.8 (P, R port) 52.4 (GZ, GS: 53.1) [54.1] 18.5 51.4

Size: 2 (Base Mounted), Pilot: 1 (External Pilot), Power Source, Command Signal: 1 (24V, 0~10V), Port Size: 01 (1/8), Thread: T (NPTF), Option: GN (Pressure Gauge, Silencer)

Size: 2 (Base Mounted), Pilot: 1 (External Pilot), Power Source, Command Signal: 3 (24V, 0~20mA), Port Size: 02 (1/4), Thread: N (NPT), Option: GN (Pressure Gauge, Silencer)

Size: Base Mounted, Pilot: External Pilot, Power Source, Command Signal: 24V, 0~10V, Port Size: 1/8, Thread: NPTF, Option: Pressure Gauge, Silencer

Size: Base Mounted, Pilot: External Pilot, Power Source, Command Signal: 24V, 0~20mA, Port Size: 1/4, Thread: NPT, Option: Pressure Gauge, Silencer

J K MM MA NB P NA M 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 95 17.5 9.5 M8 x 1.25 M14 x 1.5 18 20 60 18 44 22 44 77 1/4 25 14 30 9 16 10 50 19 50 25 9 73 115 17 13 M10 x 1.5 M16 x 1.5 20 22 73 20 53 26 53 95 3/8 28 17 30 11 22 10 63 21 55 28 8 80 122 17 13 M10 x 1.5 M18 x 1.5 22 25 80 22.4 60 26 60 102

Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101 p. 111 With buffer ZPR p. 46 p. 59 p. 82 p. 93 p. 102

39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm)

Maximum operating pressure 1.0 MPa Rubber bumper None Piping Screw-in piping Piston speed 50 to 500 mm/s Mounting Through-hole Auto switch Mountable 7-6-101 102 Refer to page 7-9-1 for further information on auto switches.

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ MU D-X 20Data ZZ + Stroke (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Single clevis