Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21 33.6 3/8" 17.9 33.6 47.9 21 1/2"

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Metric size Inch size Elbow Universal 2 3 1/8" 01 23 AS 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" AS-FE Control U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

VFA3000

port) 3 (Breathing port) 5 x , 14 38 (Piping port) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

VFRA3000

Cv 1.9 2.2 1.9 2.2 1.6 1.7 2.0 (0.96) 2.4 (0.96) 1.5 1.7 VFRA3111-02 VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

5 Port Air Operated Valve Series VFA3000 1

VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for manifold

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3 9.8 30 54.8 21.9 1.2 49.3 123 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8 19 22.5 R 3/8 24.3 9.8 30 52.6 19.7 1.2 47.4 128 AS420-N04-SD NPT 1/2 23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 27.5 R 1/2 28.5 12.4 38.5 62.9 25.8 1.2 55.8 222 Reference thread dimensions after installation. 599

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15

Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

VQ7-6/7-8

30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12

VQZ1000/2000/3000

3/8) (For Rc 3/8) 33 3 4 5 3 4 5 L plug connector (L): VQZ3 50 1(R)-L-02 03 DIN terminal (Y): VQZ3 50 1(R)-Y-02 03 Indicator light 300 157 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 300 62 <67> 55 <60> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 3 4 5 M plug connector (M): VQZ3 50 1(R)-M-02 03 60.5 (Lead wire length) Cover diameter

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

Prevents Micro-Bubbles

LQ 2 U 03 PAX PB Tubing size Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Body class Applicable fitting Tubing O.D. 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Applicable fitting Body class 2 3 4 5 6 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type

VEX1

(300mm lead wire) 1 4 1 4 H Gromet (600mm lead wire) 02 3 03 1 4 1 4 D DIN connector 3 8 3 8 DO DIN connector (Without connector) 04 1 2 1 2 AN 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (300mm lead wire) AMC 10 1 1 1 H Grommet (600mm lead wire) E Grommet terminal 10 7 12 14 9 20 2 Wihout subplate 1 4 1 T Conduit terminal D DIN connector 1 4 1 2 1 2 G Grommet (300mm lead wire) Grommet