Function: 3 Position Perfect, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -, Option: -
Function: 3 Position Exhaust Center, Body Option: Base Mounted Plug-in, Pilot: External Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -, Option: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in Conduit w/Terminal, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -
Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Port Size: -
Function: 2 Position Single, Body Style: Base Mounted Plug-in, Body Option: Standard for Base Mounted Type, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Option: -
Function: 3 Position Closed Center, Body Style: Base Mounted Plug-in, Body Option: Standard for Base Mounted Type, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Option: -
Function: 2 Position Double, Body Style: Base Mounted Plug-in, Body Option: Standard for Base Mounted Type, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Option: -
Function: 3 Position Exhaust Center, Body Style: Base Mounted Plug-in, Body Option: Standard for Base Mounted Type, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Option: -
Function: 2 Position Single, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in Conduit w/Terminal, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -
Function: 3 (3 Position Closed Center), Body Option: 0 (Plug-in), Option: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -