Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

7

3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !4 is energized, (already open) pilot valve A is closed, pressure in pressure chamber B increases, and main valve C is closed. When coil !

New

Rc Special voltage With light Without DIN connector (With surge voltage suppressor) G 24 VAC 12 VDC 48 VAC NPT 1K 1L Rc 220 VAC 240 VAC Applicable to air and water (VXN<2) Conduit terminal 1M 1W (With surge voltage suppressor) 24 VAC 12 VDC 48 VAC 1N 1P 1Q 1R 1Y 1S 1T 2A 2B 2C 2D 2E 2F Enter symbols in the order below when ordering a combination of electrical option, other option. 220 VAC

Part Number Description: HAND VALVE   Product Line: V   Product Line Description: VALVE   Family Code: 293   Family Description: VSH HAND VALVE   Class Code: 2F   Part Code: 1   Reference Code:  H   Click here to report information errorImage shown may not match exact part number, HAND VALVE, VALVE, VSH HAND VALVE, 2F, VSH, 1.59835 lb

LEC-OM07605CN

CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F

Part Number Description: VSH    Product Line: V   Product Line Description: VALVE    Family Code: 293   Family Description: VSH HAND VALVE    Class Code: 2F    Click here to report information errorImage shown may not match exact part number, VSH, VALVE, VSH HAND VALVE, 2F, VSH, 2.2928 lb

Part Number Description: VALVE SOL   Product Line: V   Product Line Description: VALVE   Family Code: 224   Family Description: VZ2000 SOL VALVE 4/5-PORT   Class Code: 2F   Part Code: 1   Reference Code:  K   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, VZ2000, VALVE, VZ2000 SOL VALVE 4/5-PORT, 2F, VZ2000, 0.33 lb

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate Plug-in Terminal 1/4, Non Plug-in Std 1/4, Option: -

Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Sub-plate Plug-in Terminal 1/4, Non Plug-in Std 1/4, Option: -

Series: 9000 (SY9000), Port Size: 2 (SY7000 3/8 inch, SY9000 1/2 inch), Thread Type: F (G)

SI Unit: E (EtherNet/IPâ„¢), End Plate: 2 (M12 power supply connector, B-coded), I/O Unit Stations: 1 (1 Station), Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: F (Both Sides, Built-in Silencers)

SI Unit: E (EtherNet/IPâ„¢), End Plate: 2 (M12 power supply connector, B-coded), I/O Unit Stations: None, Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: F (Both Sides, Built-in Silencers)