SMC Corporation of America
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62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Therefore, design within the rated water flow range (refer to the model column). 37 37 55 55 75 75 110 110 How to Calculate Outlet Air Temperature Correction Factor by Cooling Water Temperature Air pressure 0.7 MPa Outlet air temperature can be calculated with inlet air temperature, cooling water temperature and amount of air in the following procedure.

R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port VQ 1.1 13.4 13.4 VQ4 VQZ 3 4 5 3 4 5 0 1 0 1 VQD L plug connector (L): VQZ1 5 (R)lLl01 M plug connector (M): VQZ1 5 (R)lMl01 VZS VFS VS Cover diameter 1.5 Cross section 0.23mm2 (Lead wire length) 54<59> VS7 Indicator light 300 117<119> Indicator light 300 129<131> 54<55

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

The valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 73 AR10-A Series AR20-B to AR60-B Series AR20K-B to AR60K-B Series Dimensions AR10-A Panel mounting dimensions 2 x P1 (Port size) A P2 (Pressure gauge port size) W C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel

B A VQ410 0 1 3 P" 2 Gasket Gasket (3) Pressure switch P2 (2) Release valve (ON) 1 B A P1 Stations Outlet side piping Inlet side piping (1) Filter regulator Pressure switch R1 R2 P1 Po (Supply port) P Release valve Control unit Circuit of control unit manifold Regulator with filter 2-5-41 Base Mounted 42 Series VQ4000 Manifold with Control Unit Plug-in type 2n-Rc 1/4, 3/8, C8, C10, C12, 4

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of branch type)) (DIN rail clamp screw) R R R BUS 76.7 76.5 12 3 X 3 3 72 BUS IN B X 49.5 B B B B B B B P X P 12 P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

The values of Kv and Cv factors for pneumatic purposes are different due to different test methods. 3 3 Water flow rate Q0 [L/min] (When Av = 1 x 106 [m2]) Saturated steam flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) 2 Upstream pressure P1 = 1 MPa 2 P1 = 0.8 MPa 1 0.9 0.8 0.7 0.6 1 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Example 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 Example 1 P1 = 0.3 MPa 0.3

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

Individual spacer R1 13-2-55 55 Series ZX Vacuum Pump System Manifold Common EXH Common air supply for vacuum valve Common vacuum supply End plate Manifold base 4-5.5 mounting hole Adjustment needle Adsorption confirmation switch ZSP1 Manual override (Push and turn the locking type override.)

Common External Pilot Piping VVEX2-2 VVEX4-2 PE: Pilot exhaust PE: Pilot exhaust R P P1 P P1 R P1: Common external pilot port P1: Common external pilot port How to Order Manifold Base Note) Air operated The VEX3220 and VEX3420 (air operated) are used. Distinction between the pilots (internal or common external pilot) of the manifold base does not matter.

P1 = 0.5MPa 0.08 0.08 Pressure drop MPa Pressure drop MPa P1 = 0.3MPa P1 = 0.1MPa P1 = 0.1MPa 0.06 0.06 0.04 0.04 0.02 0.02 0 0 15000 10 5000 1000 2000 3000 4000 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AL60 Rc 1 AL30 Rc 3/8 0.1 0.1 Specific Product Precautions P1 = 0.7MPa 0.08 0.08 P1 = 0.5MPa Pressure drop MPa Pressure drop MPa P1 = 0.3MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 =

1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.