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Note 3) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

The values of Kv and Cv factors for pneumatic purposes are different due to different test methods. 3 3 Water flow rate Q0 [L/min] (When Av = 1 x 106 [m2]) Saturated steam flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) 2 Upstream pressure P1 = 1 MPa 2 P1 = 0.8 MPa 1 0.9 0.8 0.7 0.6 1 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Example 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 Example 1 P1 = 0.3 MPa 0.3

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

Individual spacer R1 13-2-55 55 Series ZX Vacuum Pump System Manifold Common EXH Common air supply for vacuum valve Common vacuum supply End plate Manifold base 4-5.5 mounting hole Adjustment needle Adsorption confirmation switch ZSP1 Manual override (Push and turn the locking type override.)

Common External Pilot Piping VVEX2-2 VVEX4-2 PE: Pilot exhaust PE: Pilot exhaust R P P1 P P1 R P1: Common external pilot port P1: Common external pilot port How to Order Manifold Base Note) Air operated The VEX3220 and VEX3420 (air operated) are used. Distinction between the pilots (internal or common external pilot) of the manifold base does not matter.

P1 = 0.5MPa 0.08 0.08 Pressure drop MPa Pressure drop MPa P1 = 0.3MPa P1 = 0.1MPa P1 = 0.1MPa 0.06 0.06 0.04 0.04 0.02 0.02 0 0 15000 10 5000 1000 2000 3000 4000 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AL60 Rc 1 AL30 Rc 3/8 0.1 0.1 Specific Product Precautions P1 = 0.7MPa 0.08 0.08 P1 = 0.5MPa Pressure drop MPa Pressure drop MPa P1 = 0.3MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 =

1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

P1, L1 C2 S/S. P1, L1 C3 S/S. P1, L1 C4 S/S. P1, L1 C6 S/S. P1, L1 RC3-1 S/S . P1, L2 T1 S/S . P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No.

Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

External Pilot Adiabatic Space Caution Caution Piping of pilot port (P1, P2) P1 and P2 piping should be as follows according to the model. There is a space between body and cover (: approximate 1 mm) for adiabatic effect.

(ANR) Orifice 3 (VXA3135 4)P1 0.1MPa Orifice 2.2 (VXA3125 4)P1 0.23MPa Orifice 1.5 (VXA311 5 4)P1 0.55MPa How to Calculate Flow/Air qEquation in the domain of subsonic flow P1+0.1013=(1 to 1.8941)(P2+0.1013) Calculation by Cv factor Q=4073.4Cv gP(P2+0.1013)l/min(ANR) Calculation by effective area Q=226.3S gP(P2+0.1013) l/min(ANR) wEquation in the domain of sonic flow P1+0.1013 1.8941

When P1 is blinking, use UP & DOWN key to reconfirm each and individual present value. When the input, value is blinking, press READ once to shift the operation back to P1. 48 11-2 Program Setting Input desired cylinder positions. 11-2-1 Input Method Turn the controller switching mode to PROGRAM. Note: Step 0 for every program is END. Program no 1 will start blinking.

AUTOMOTIVE All Models except 55 EUROPEAN DIN STYLE COIL All Models except 55 MANIFOLD MOUNT Models 25, 35 AN CONNECTOR 1/2 NPT All Models All Models BODY OPTIONSsee page 80 FLANGE MOUNT 3.75 SPLICE BOX HOUSING Models 25, 75 .34 3.22 (95.3) METERING TO ORIFICE All Models 2.50 (8.6) (81.8) PORT 90 RIGHT Models 25, 35, 55 (63.5) JIC HOUSING All Models except 55 METERING TO ORIFICE Model 25

fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Pmax Vacuum pressure P1 1. If the ejectors suction port is closed and sealed tight, the suction flow becomes 0, and the vacuum pressure increases to the max. (Pmax). 2. If the suction port is opened gradually and air is allowed to flow (the air leaks), the suction flow increases, and the vacuum pressure decreases. (The condition of P1 and Q1) 3.

Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa from the table and convert P1 to 0.3 MPa.