VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

100

Pmax Vacuum pressure P1 Qmax Q1 How to Read the Time to Reach Vacuum Suction flow rate The graph indicates the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 L sealed tank.

INFORMATION Step Motor Controller 5 types of communication protocols New New

23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 6 JXCE1/91/P1/D1/L1 Series Options Controller setting kit JXC-W2 Power supply plug JXC-CPW The power supply plug is an accessory.

Air Fittings & Tubing

Note1) D1: max. diameter SKQ9, #13 to #22 Tl 2.1-18 Series KQ2 Double branch universal male elbow: KQ2ZD Tube O.D. (mm) H A (1) Weight (g) Thread R(PT) D1 D2 P2 L2 L3 M P1 L1 Part No.

KJ

9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6 1 2 KQ2L13-04S 37.5 40 22 Reference dimensions after R thread installation.

Table of Contents

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

1 49.5 55.1 (Lead wire length) Approx. 300 37.6 61.7 [68.7] Pg7 105.8 86 [88.2] 94.9 87.5 81 18 18 18 18 18 18 18 18 28 4.3 28 28 28 4.3 9.5 9.5 4.3 4.3 9.5 9.5 22 22 22 22 Note) Refer to page 340 for dimensions of connector types. 135 Series SY3000/5000/7000/9000 Dimensions: Series SY5000 [ ]: AC 2 position double Grommet (G), (H): SY5240(R)-02 G H (A, B port) 1/4 18 9.5 (Light/surge voltage

SFOD-OMT0005CN

)No LinkNo Activity BUS IN (P1) LinkNo Activity BUS IN (P1) Link Activity L/A2 BUS OUT (P2)No LinkNo Activity BUS OUT (P2) LinkNo Activity BUS OUT (P2) Link Activity 7.2 LED LED LED PWR ALM MS NS EtherNet/IP EEPROM : LED EEPROM (PWR()) * () -30- 8 8.1 No.

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

SYJ3000/5000/7000

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-58 59 5 Port Solenoid Valve Rubber Seal Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

ZP

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Vacuum Pad

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

The inlet pressure obtained in the flow characteristic graph of silencer indicates the pressure (P1) prior to silencer. (Refer to the diagram below.)

Series VQ Base Mounted Metal Seal/Rubber Seal

L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.