SMC Corporation of America
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Pmax Vacuum pressure P1 1. If the ejectors suction port is closed and sealed tight, the suction flow becomes 0, and the vacuum pressure increases to the max. (Pmax). 2. If the suction port is opened gradually and air is allowed to flow (the air leaks), the suction flow increases, and the vacuum pressure decreases. (The condition of P1 and Q1) 3.

29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

(AFM, AFD) 0.12 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.06 0.04 0.04 0.02 0.02 0 80 160 240 200 400 600 800 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) IDG75M, 75V (standard dew point 20C (4F)) IDG75HM, 75HV

9, @0, @1, @2 and @4 from the table above DSeal kits are sets consisting of items 19, 20, 21, 22 and 24 and can be ordered using the seal kit number for each cylinder bore size.

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

= Inlet pressure) (P2 = Outlet pressure) Inlet pressure P1 (MPa) R A Flow rate (/min (ANR)) P A Inlet pressure: 0.3 MPa Outlet pressure (MPa) Set point Set point Outlet pressure (MPa) Inlet pressure P1 (MPa) Outlet pressure (MPa) Set point Set point R A Flow rate (/min (ANR)) P A Inlet pressure P1 (MPa) 14-9-14 5 Electro-pneumatic Proportional Valve Series VEF/VEP Construction Flow type

Ex2) 3 port valve: Switching nozzle VNH P1 P1 port (Pilot air SUP port) nozzle P1 port (Pilot air SUP port) 2(A) 1(P) Tank Coolant pump 3(B) Switching nozzles on supplying coolant liquid.

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

= 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa 30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 4 5 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 0.001 0.01 0.1 0.002 0.003 0.02 0.03 0.04 0.004 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when water [15 L/min] runs through the solenoid valve with a Kv = 1.5 m3/h.

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

) 2.5 Indicator (Option) 1 8 2 x 2 x 1/8 (Back side 10(P2)) P1 51.5 75 40 64 (12.5) 1(A) (Back side 2(B)) Main port Port size: refer to table below (1.6) 23 24 (21) 45 27 Bracket (Option) 2 x 4.5 2 x M4 x 0.7 depth 7 18 50 Main port 1(A), 2(B) Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2

IFW550 0.10 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa P1 = 0.3 MPa 0.08 Pressure drop (MPa) P1 = 0.2 MPa 0.06 P1 = 0.1 MPa Component Parts 0.04 No. Description Material Description Material No.

The inlet pressure obtained in the flow characteristic graph of silencer indicates the pressure (P1) prior to silencer. (Refer to the diagram below.)

Inlet pressure (IN) Pressure in diaphragm chamber When the inlet pressure (P1) is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1). When the inlet pressure (P1) is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2).

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

N.C. 12 (P2) 12 (P1) 12 (P1) 12 (P1) VX2 VX (1) (2) (1) (2) (1) (2) (1) (2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC Wide selection of port size and variations LVA LVH Threaded type (6A to 50A) Flange type (32F to 80F) LVD LVQ LQ LVN Low water

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

directions Mounting is possible on either the front or the back Expanded regulating pressure range The maximum set pressure has been expanded from the conventional 0.7MPa to 0.8MPa Compact and light weight IR1000 width 35mm weight 140g (previously unavailable small size added) IR2000 width 50mm weight 300g ( width 14%, weight 6% Compared to SMC IR200) IR3000 width 66mm weight 640g ( width 21%