Table of Contents

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None

1

20 13 31 Dimensional Range Not Possible to Machine Additionally B C D A B C D A 91 16 Bore (mm) 20 25 32 40 50 Bore (mm) 20 25 32 40 23 13 31 D LX Model MXH6 MXH10 MXH16 MXH20 18 10 28 12 18 10 28 16 114 20 29 19 36 11 27 23 13 36 13 23 13 36 20 132 25 34 19 44 15.2 32 23 13 36 16 23 13 36 20 156 30 38 19 44 20 38 27 15 42 20 27 15 42 25 186 35 44 26 58 26 43 33 19 52 25 214 40 49 26 64

LEC-OM07605CN

. 117 11.2.2 . 119 11.2.3 . 119 11.2.4 . 11-11 11.3 MR ConfiguratorTM(MR Configurator2) . 11-12 11.4 (LEC-MR-BAT6V1SET) . 11-14 11.5 . 11-15 11.6 () . 11-18 11.7 () . 11-18 11.8 . 11-19 11.9 . 11-26 11.10 EMC() . 11-29 12 121 126 12.1 . 122 12.2 . 123 12.3 . 124 12.4 . 125 12.5 . 126 13 STO 131 13-14 13.1 . 132 13.1.1 . 132 13.1.2 . 132 13.1.3 . 132 13.1.4 STO . 133 13.1.5

CV/MVGQ

11 13 16 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Series SV

Quantity 20 19 18 17 16 15 13 12 11 14 10 9 8 7 6 5 4 3 2 1 Valve stations Single solenoid Double solenoid Closed center Exhaust center Pressure center N.C./N.C. N.O./N.O. N.C.

SX

17.5 15.5 14 13 12 16.5 15 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 350 362.5 387.5 400 325 337.5 294 310 326 342 262 278 Manual override (Press and turn for the locking type.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.

Free Mount Cylinder

5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 7 10 11 12 15.5 19.5 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 13 15 20 26 32 40 7 9 12 16 20 24 22 24 32 40 50 62 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

22 22 24 D 15.5 19.5 19.5 21 B 120 120 122 154 ZZ H H2 H1 B2 B1 80 80 82 108 F 8 10 12 14 GC 13 13 13 16 KA FL 10.5 10.5 10.5 13.5 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 LC WB 13 13 13 16 LH 6.8 6.8 6.8 7 LX 3.2 3.2 3.2 3.2 LZ 40 40 40 55 X 55 55 55 75 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S

CM2

TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard Type

Table of Contents

Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series. 11-4-3 69 Series CRB1 Effective Output CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 50 40 Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Double vane Double vane Double

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series. 11-4-3 69 Series CRB1 Effective Output CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 50 40 Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Double vane Double vane Double

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series. 11-4-3 69 Series CRB1 Effective Output CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 50 40 Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Effective torque (Nm) Double vane Double vane Double

CA2

32 10 15 51 42.3 56 M8 x 1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 11 35 32 70 27 52 20 13 40 12 17 58 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 11 35 32 85 27 64 20 15.5 40 10 17 58 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 13 40 37 102 32 78 25 18.5 52 14 21 71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37

ISO Cylinder

13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.