Compact manifold regulator ARM5 Series

PBT 2 B Port plug 2 Bonnet PBT, HNBR Refer to page 705.

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Vacuum

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Vacuum System Peripherals:

. 2 2 to 10 stations Both sides D side D B Double wiring specifications 08 2 to 16 stations 8 SUP/EXH block assembly specifications 09 9 Can accommodate up to 17 solenoids.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Refer to page 4 for minimum stroke with auto switch. 32 is only available for B series rod sizes. CH2 H B B 50 100 CH D2 H B B 50 100 A53 Standard Type With Auto Switch Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc. 3 pcs. "n" pcs.

Suction Guard (Produced upon receipt of order) FHG Series

Body mounting dimension AC AC Window for removal H AD Window for removal H AD Body mounting dimension Body mounting dimension Element Element FH FH (mm) adjustment range A B C D F G H I L M S U V r AC AD AG 1 2 3 4 5 Standard T dimension Port size (Nominal size) T dimension HOW 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 215 215 215 265 265 265 325 325

VCC

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

AS-FE 1/8 0.07 1/4 0.16 KE 3/8 0.2 1/2 0.4 AS-FG When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body A. If the tool is in contact with the body A, this may cause the body B to come off. AS-FP AS-FM 4.

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Table of Contents

resin Wear ring B !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN

VQ5000

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12