VQ5000

metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 C [dm3/(sbar)] 12 12 VQD 4/2 5/3 (A/B EA/EB) 0.14 b 0.14 0.14 2.9 Cv 2.9 2.9 12 C [dm3/(sbar)] 12 12 1 4/2 (P A/B) 0.33 0.33 b 0.33 3.4 3.4 Cv 3.4 2 position rubber seal VQ5 01 1 2 16 16 C [dm3/(sbar)] 16 4/2 5/3 (A/B EA/EB) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

SZ3000

Particularly when using a C-R element (surge voltage suppressor) for the protection of a switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element.

CNA

A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

CNA

A U T O S W I T C H S M C A U T O S W I T C H A 36 B 36 Auto switch D-F5/J5 D-F5NTL D-F5W/J59W D-F5BA/F59F D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL Hs Auto switch Hs Auto switch Hs Ht 24.5 SMC SMC Ht A 30 (33) B 14 A 33 B ( ): Donates the value of D-F5LF.

Return Filter FH100 Series

D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 3 39.4 20.1 KPGR04-06 KPQR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPGR04-08 KPQR04-08 8 20.8 4 42.5 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 5 21.2 45 KPQR06-10 KPGR06-10 Applicable fitting size d 10 5 47 23.2 KPGR08-10 KPQR08-10 8 15.2

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 U seal Retaining ring for hole type C HNBR Tool steel y !

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

VQC

(A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) C Note) 5 (R1) 3 (R2) 1 (P) Function 5 (R1) 3 (R2) 1 (P) N.C N.O Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.

25

X14 1 1 1 1 2 2 3 3 4 5 7 7 IZD IZE IZH Drop prevention cover When attached to the body Transition wiring cable Remote controller/IZS41-RC IZS41 CF Transition wiring cable 02 05 08 Full length 2 m Full length 5 m Full length 8 m AC adapter For IZS40 IZF10 C AC adapter G1 G2 AC adapter + AC cord AC adapter (without AC cord) AC cord is only for use in Japan.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30