25

Note 3) Refer to the operation manual for handling of the remote controller. 0 to 45C 35 to 80% RH (with no condensation) 33 g (excluding dry cell batteries) CE Ambient temperature Ambient humidity Weight Standards/Directive Construction IZS40 series y r t q e Description No.

Flow Control Equipment

Air Flow/Effective Area Model AS12l1FM AS13l1FM AS22l1FM-01 AS23l1FM-01 AS22l1FM-02 AS23l1FM-02 6, 8 Tube O.D.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

VEX-OMY0001

02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A (ZS-46-A1)], Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Manual: T (w/o Operation Manual, Calibration Certificate)

PSE300.eng

Auto shift setting (PSE3 2(T)/3 5(T) models only) 1)Select the display mode of the pressure value at the time of auto shift operation. Either [AS (Auto shift)] or [ASO (Auto shift zero)] can be selected. AS (Auto shift): [AS] displays the differential pressure of the atmosphere and measurement pressure.

SI unit for EtherNet/IP TM

T Topology Connection configuration of the network -10No.EX-OMX1001 Installation and Wiring Installation Connect valve manifold to the SI unit.

EXxx-OMY0006CN

/PL / 16 108 No.EX##-OMY0006CN 22.F + + SFF 99.98% 99.98% PFDAV (T) Average Probability of -3 1% of 10 -2 1% of 10 Dangerous Failure PFH (T) Probability of dangerous -7 1% of10 -6 1% of 10 failure per hour Achievable Safety Level SIL3 / PL e SIL2 / PL d SIL3/PL e SIL2 PL d 109 No.EX##-OMY0006CN 23.GEX245-FPS EX245-FPS1/2/3 Input delay : tFilter + 2 ms tFilter = Parameterized filter

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: T (w

Two Hand Control Valve

.: AN101-01 Option Bracket Part No.: VR51B EN574: 1996 + A1: 2008 Class: Type III A Standard Bottom mounting Note) In the case of using soft nylon or polyurethane tubing, use caution when the maximum operating pressure of the tubing is used.

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)