ASD

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

PSxx-OML0002CN

2 ) A(ZS-38-A1) M35 L B(ZS-38-A2) A M35 L M35 L B M35 L -14No.PS-OML0002CN-G C(ZS-38-A3) M35 L C M35 L A/B/C4 -15No.PS-OML0002CN-G M38 L(2) (ZS-27-C) +(ZS-27-D) M3X8L ( ) (ZS-27-C/D) 90 2 -16No.PS-OML0002CN-G 1. 2. 1)0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -17No.PS-OML0002CN-G ,FG () () DC(+) 5 OUT1 4 OUT2 3 (FUNC) 2 DC(-) 1 -18No.PS-OML0002CN-G Z/ISE30A(F)--DC(+) OUT -N NPN 1 Max

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

•

Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

PSxx-OMS0006CN

C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

Regulator for 2 MPa ARX 20

min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

NARM Series

Regulator for manifold Accessory NARM1000-6A1-N01G Body size Port size (OUT side) None (with plug) Pressure gauge G 01 8 1 1000 2000 Porting Thread Symbol IN OUT A1 A2 B1 B2 N Rc(PT) NPT Number of stations Manifold side Body side Manifold side Body side Common 1 1 station Individual Model Part Name NARM1000 NARM2000 Regulator w/o mfld NARM1000A NARM2000A Pressure gauge G15-P10-N01 G15