LJ1H

/60Hz) Nil W None N.C.

CG5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Modular F.R.L. Unit

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

REA/REB

D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

VM

Push Button (Extended)/VM122-M5-32R, B, G, Y/VM132-M5-32R, B, G, Y JIS Symbol 2 port Panel mounted hole 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

I

T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u r e d i s p l a y board (4) LCD.

Vacuum Pad

mm 15 mm 20 mm Polyurethane tubing 2 P.31 Barb fitting Soft nylon/ Polyurethane tubing 4, 6 2, 4, 6 One-touch fitting J JB K ZP3-Y ; Construction P.41 Adapter Applicable Pad List P.42 Buffer Applicable Pad List P.43 Mounting Adapter Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

CY1

D1.6x P First tentative bore size determination 0.1xWcos+Wsin D5.0x P 0.1xW+W D5.0x P W W>WV P>PV Determination of allowable load weight & pressure Inclined operation (Refer to p. 39 for vertical operation.)

Prevents Micro-Bubbles

Dimensions Y 4-Mounting hole for W LLHA--C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n-P P (IN) port 2-P (mm) Dimensions (mm) B C E G H1 H2 K N P R U W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 50 31 65 20.5 10 85.5 87 18 27 Rc1/4, NPT1/4 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 37 90 25.5 19 112.5 114.5 39 37 Rc3/

VQ7-6/7-8

VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16