42

(For F, L, S, T kit) 1. D-side end plate assembly part no.

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

ISO Cylinder

S Single acting, Spring return T Single acting, Spring extend Made to order For details, refer to page 71.

Battery-less

Select Nil, S, or T for DeviceNet or CC-Link.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

V7 S B 3 M2 LEFB 32 q w e r y t u i o !

CG5-S

nut SUS304 Rod end nut SUS304 Label protector PET CJ5SR CJ5SV NBR 8 Water resistant scraper FKM 3 Stainless Steel Cylinder Series CJ5-S Dimensions R V Basic type (B)/CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB D F NA NB A With head cover port in axial position (R) BA BB H S + Stroke Z + Stroke (mm) Bore size (mm) A BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z

One-touch Fittings Series KQ2

8 / 3 S 3 0 7 0 T 2 Q K 7 1 5 . 9 2 0 3 5 3 8 / 1 S 1 0 9 0 T 2 Q K 2 1 2 . 5 1 2 1 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 T 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 T 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 T 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 T 2 Q K 5 . 1 3 5 . 4 3 8 3 2 / 1 S 4 0 1 1 T 2 Q K 2 2 5 . 5 3 5 . 6 3 4 6 4 /

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

tubing O.D. d D3 D1 AS-F TMH L4 L3 M ASD AS D2 AS-FE L5 A KE AS-FG AS-FG H T AS-FP L1 L2 AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS13l1FG-M5-23A 3.2 ASP 7.2 11.6 19.7 AS13l1FG-U10/32-23A AS13l1FG-M5-04A 4 8.2 17.5 33.8 ASN M5 x 0.8 10/32UNF 8 20.1 AS13l1FG-U10/32-04A AS13l1FG-M5-06A 6 10.4 21.2 20.4

VQC

Kit: Terminal block box 759 (Double, 3P) VQC101-5 M5 (M5 threads) S Kit: Serial transmission ( ) T Kit 1 to 10 stations ( ) C10 (for 10) 1051 (Single) F Kit: D-sub connector C4 (for 4) S Kit 1 to 8 stations: EX500 1 to 12 stations: EX250 VQC200-5 Options Direct outlet with built-in silencer P Kit: Flat ribbon cable VQC2000 VV5QC21C6 (for 6) Side 1144 (Double, 3P) VQC201-5 T Kit: Terminal

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Aluminum High Vacuum Angle Valve

Clausings factor 8 Exhaust Time (Low/Medium Vacuum) K The time (t) required to exhaust a chamber at low vacuum with volume V (L), from pressure P1 to P2, using a pump with pumping speed S (L/sec) is t=2.3(V/S)log(P1/P2). In high vacuum, this is subject to the ultimate pressure limit imposed by outgassing and leakage as characterized above.

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

Compact 5-Port Solenoid Valve

Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

2 Phase Stepper Motor/Without Motor Brake Series LXS

) (52) The dimension inside [ ] shows the location at which the home position switch operates. 58 28 N x P 5 U 36: T-slot pitch 20 N C 1 0.2 (5.1) 10 5.8 4 5.5 36 10.5 6.5 6.5 1 3 39 28 3.3 T-slot A 4H9+0.030 0 depth 4 C 4H9 +0.030 0 depth 4 Work piece mounting reference plane Body mounting reference plane T-slot A dimension T-slot B dimension L-M6 6.5 Refer to cross section C-C. 27.5 T-slo

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

Modular Design with Uniform Body Style

N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P (Port size) A Clearance for maintenance G 91 Lubricator AL20-D to AL60-D Series Semi-standard PC/PA bowl Metal bowl Metal bowl

MGP

M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19 5 6 6 15 18 21 30 36 42 15 18 21 22 24 30 16 20 25 78 62 10.5 M5 X 0.8 M5 X 0.8 37.5 10.5 25 25, 50, 75, 100, 125, 150, 175, 200 78.5 62.5 11.5 M6 X 1.0 M6 X 1.0 37.5 13.5 28.5 WA WB Bore (mm) Standard stroke (mm) R S T U VA VB X XA XB YY YL Z 100 to 175st 100 to 175st 75st