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Note 3) The flow rate unit is based on 0C and 101.3kPa. 87 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Series PFA Sensor Unit Construction PFA710/750 PFA510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PFA711/721/751 PFA511/521/551 q w e r t y Parts list No. 1 2 3 4 5

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !

t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !

t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !

F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

29.8 051.5 3.6 46.7 25.2 07 1.4 28.5 090 RB1007 53.5 30.1 45.0 072.5 5.0 67.3 36.3 12 0.9 39.0 128 RB1412 83.5 36.1 70.5 108.0 6.0 73.2 36.2 15 0.9 43.0 178 RB2015 Shock absorber for high load + Adjusting bolt MY3B Bore size Stroke H (Shock absorber stroke) T S EY EC SD E W FC TU Stroke adjusting unit h TT (mm) E EC FC h S SD T TT TU W Shock absorber model EY Applicable cylinder MY3B16 MY3B25

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

200W/60 400W/60 Electric specification Motor type AC servo motor (AC100/200V) Motor type S2,S3,S4: Incremental 17bit encoder (Resolution: 131072 p/rev) Motor type T6,T7,T8: Absolute 22bit encoder Resolution: 4194304 p/revFor LECSB2-T, LECSS2-T Encoder Note7) Motor type T6,T7,T8: Absolute 18bit encoder (Resolution: 262144 p/revFor LECSC2-T Max. 725 Power [W] Note5) Max. 445 Max. 1275 Type

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 No.

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !