Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

H7NF 4-wire (NPN) 5 V, 12 V Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Solid state switches marked with are produced upon receipt of order.

ZP3

Female thread B5 M5 x 0.8 One-touch fitting 02 2 04 4 Female thread B5 M5 x 0.8 Barb fitting U2 For 2 polyurethane tubing1 U4 For 4 soft tubing2 1 Polyurethane tube piping 2 Soft nylon/Polyurethane tube piping With buffer u Vacuum inlet : ZP3-T/Vertical : ZP3-Y/Lateral Type Symbol Size Pad diameter All sizes Female thread B5 M5 x 0.8 One-touch fitting 02 2 v 04 4 v Barb fitting U2 For

Series AP500

No code M V X 4) PTFE recommended for applications such as within a process tool. 5) Not available with SH material.

Thermo-chiller/Rack Mount Type

The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Circulating water Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Iron (Fe) [mg/L] 0.3 or less v v Reference item Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Direct Solenoid

NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7." Bottom(s] 7 1 6 DIRECTIONAL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 4$14 NVS 4l14.{!0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

Thermo-chiller

Filter Rc1/2 20 m V V 3 Valve Rc1 V Rc1/2 V 4 Valve Rc1/2 V V 9 Y-strainer Rc3/8 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it. Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

and main valve 02: With Rc (PT)1/4 port sub-plate D: Push locking slotted style R Port P/E Port R: External pilot style Electrical entry 24V, 12V, 6V, 5V, 3V DC/100V, 110V, 200V, 220V AC Grommet L plug connector M plug connector G: 300mm lead wire L : 300mm lead wire M: 300mm lead wire MN: Without lead wire SYJ7l2R is only for manifold use.

Hydraulic

CHQB100 10D (M) CH QB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) x 195l 100 (M) 75D (M) 100D (M) M6 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 155l CH QB50 10D (M) 15D (M) 20D (M) 25D (M) 30D

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

•

L M (mm) (mm) ,B C ,K , L Model 0 F H V M E G ZPY10B 10 12 76 87 16 26 42 5.5 13.8 5.5 53 .ZPY.138 j3 44.5 78.5 89.5 8.7 7.5 15 t8.5 28.5 55.5 19 ZPYI86 16 46 57 18 20 30 60 91 9.9 21 8.5 Applicable lube ApQ licable tUDe .E' Q R ~y'on tube, 4 / 2.5) 14.5 5 1.8 !

VFR

x 1 m A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 minute, AC 1000 Cannot be used for transfer wiring.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 minute, AC 1000 Cannot be used for transfer wiring.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Table of Contents

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are