Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: w/o Lead Wire, Option 2: None, Option 3: Operation Manual, Calibration Certificate

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: 01 (R 1/8), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS1001FG AS2001FG AS2051FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS3001FG AS4001FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle

Miniature Regulator

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

rotations Number of needle rotations OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Number of needle rotations Number of needle rotations Inlet pressure (MPa) IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Effective area (mm 2) Flow rate (l/min

PFxx-OMJ0005CN

[L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8)

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -