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M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

VQ5000

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted 6 Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

Proposals for Energy Saving

Dimensions Dimensions Q FB X Y + Stroke B + Stroke A + Stroke Bore size (mm) Y Q X 86 (94) 96 (105) 109 (121) 25 39 32 40 A Bore size (mm) 29 31 46 57 B FB 51 stroke or more 97.5 99 114 114 129 129 148 166 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 50 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 Note 1) Dimensions other than the above are the

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

OMR0032

Operation Instructions. 66 13.1 Overview of the operation instructions . 66 13.2 Operation procedure of pulse input signal . 66 (1) Power on and return to origin position . 66 (2) Positioning operation . 67 (3) Pushing operation . 68 (4) Pushing operation completed. . 69 (5) Alarm reset . 69 14.

5 Port Air Operated Valve

Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 2B 2B VZA (1.6) 66

Series SV

(B) 2 (A) 4 Weights SOL.b SOL.a 3 (EB) 5 (EA) Series Type of actuation Weight g (lbs) Single solenoid 66 (.14) 1 (P) Double solenoid 71 (.15) 4 position dual 3 port valve: N.O./N.O.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VT Manual override VP (Non-locking) VG 59.5 [66] 47.1 VP 53.5 40.5 25 VQ VQZ VZ [ ] for AC VS L plug connector (L) M plug connector (M) 59.5 [66] 4-Rc (PT)1/8 53.5 10.5 (P/R port) 4-Rc (PT)1/8 53.5 10.5 (P/R port) 23 8 23 8 39 70.9 [72.2] 39 66.9 80.5 25 25 (Lead wire length) 300 70.6 [77.1] (Lead wire length) 300 47.1 [ ] for AC Other dimensions are the same as the grommet.

VQ5000

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

ZP

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

ZX

66 Vacuum Module: Ejector System Series ZX Ejector System/Manifold Disassembly from Individual Unit Manifold disassembly from individual unit Philips screw 1.

Air-hydro Unit

107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(11-, 22-) G H2 G H1 Width across flats B1 MM FZ FX Eh8 D I 20 to 32 Width across flats KA Relief port (10-, 21-) Vacuum port (11-, 22-) (32,40) Standard port 45 Width across flats NA FT K A AL 1.5 Z H ZZ + Stroke S + Stroke F FY 4 x FD 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ 66

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

CRB2/CRBU2/CRB1

N (Example) R73CN 66 Rotary Actuator Vane Type Series CRB1 Specifications Excellent reliability and durability The use of bearings to support thrust and radial loads improves reliability and durability. The body of the rotary actuator can be mounted directly. Two different port positions (side and axial) are available.

REA/REB

D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66

CC

107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of