SMC Corporation of America
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1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Dimensions 220 30 25.5 3000 Lead wire length Left end adjustment limit Right end adjustment limit AIRCHECKER PS1000-R06L + 13 10 PRESS. 0.10 to 45 MPa {1 to 4.6 kgf/cm2} MADE IN JAPAN Internal Circuit/Wiring Calibration trimmer Lead wire colors inside ( ) are those prior to conformity to IEC standards.

Option) Note) Single mounting type: M5 x 0.8 female threaded. 23 NPN open collector 1 output Failure predict function without analog output 24 NPN open collector 1 output Failure predict function with analog output (1 to 5 V) Caution Refer to pages 16-14-3 and 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13

115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 13

state) VN LVC LVA Characteristic Specifications LVH Max. operating pressure (MPa) LVD (1) (1) Max. operating pressure differential (MPa) Flow characteristics Port size Orifice size (mm) Weight (kg) Class Model LVQ Av x 10-6(m2) Cv converted 0.16 2 2.0 3.8 LQ 0.33 3 0.8 7.9 1/8 (6A) 1/4 (8A) 3.0 1/8 : 0.21 1/4 : 0.24 2 VCB2 0.51 4 0.5 12 LVN 0.65 5 0.3 16 0.35 3 2.0 8.4 TI/ TIL 0.54 4 0.8 13

the initial state) VN LVC LVA LVH Characteristic Specifications LVD Max. operating pressure differential MPa (1) Orifice size (mm) Flow characteristics Weight (kg) Max. system pressure MPa LVQ (1) Class Model Port size Av x 10-6 (m2) Cv converted LQ 0.16 3.8 1.0 2 LVN 0.33 7.9 0.8 3 1/8 (6A) 1/4 (8A) 1.0 1/8: 0.21 1/4: 0.24 2 VCS2 0.51 12 0.5 4 TI/ TIL 0.65 16 0.3 5 0.35 8.4 1.0 3 PA 0.54 13

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

OUT Note 1) Refer to page 17-3-13 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

holes) 22 SlA 16.4 10 VlA Manual override (Non-locking) M3 X 0.5 (Pilot port) 3-M3 X 0.5 (P, A, R port) 1 (Bleed port) 1.5 SlA VlA R P 30 2 27 7 A 12.7 9.2 VM/VR 2 15 Bracket 10 VH 11 Base mounted: SYJA3l4-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot style) (Mounting holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13

of the valve Volume : 13% Weight : 25% Compared to previous series (Class 2) Electrical entry directions } Electrical entry is possible from four directions Flame resistance UL94 V-0 standard SMC 1 Special construction reduces operating resistance When shipped from the factory, the electrical entry is on the IN port side.

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MXS/MXJ GUIDED CYLINDER, C5, 6MM MXJ/MXS CLEAN-ROOM, 0.66798 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MXS/MXJ GUIDED CYLINDER, H5, 20MM MXS CLEAN-ROOM, 3.30693 lb

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MXS/MXJ GUIDED CYLINDER, G5, 16MM MXS CLEAN-ROOM, 1.91067 lb

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available