Multistage Ejector (N)ZL Series

2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Stainless Steel Heat

cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M Model IDUS3E IDUS4E Port size J A B C D E F G H K L M 260 470 540 85 130 297 330 315 380 325 440 350 Rc 1/2 85 130 Rc 1/2 260 560 540 440 325 530 297 330 315 470 IDUS6E 315 130 605 540 Rc 3/4 515 485 325 355 325 575 285 110 Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6 3 Stainless Steel Heat Exchanger

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

MHF2

4.5 1 1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK MHF2-8D1 Red ON Green ON MHF2-8D MHS 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHC MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHT MHF2-12D1 MHY Mounting of Auto Switch MHF2-12D2

MHF2

4.5 1 1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

AFF

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

CG1x-OM0006N

P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M Model IDUS3E IDUS4E Port size J A B C D E H K L M F G 260 470 540 85 130 297 330 315 380 325 440 350 Rc 1/2 85 130 Rc 1/2 260 560 540 440 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 515 485 325 355 325 575 285 110 Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6 3 Stainless Steel Heat Exchanger

IDUS/IDFS

Series IDFS IDFS6E/8E/11E Evaporation thermometer G H Illumination switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M A B Model IDFS6E IDFS8E Port size J C D M F

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

or more / 5 mA or more(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied voltage of 0 V)5 V or less / 1 mA or less(At NPN input, between the pin for input terminal and for sensor supplied voltage of +24 V) (At PNP input, between the pin for input terminal and for sensor supplied

CEx-OMI0064

0 0 V R [CR] + 0 1 2 3 4 5 (10 ) 28 - # 0 0 D R [CR] No.

OMS0020

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Rotary Actuator NCRA1 Series Single Rack and Pinion

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !