This is a legacy product, and replaced byZH10BLA-06-06, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, CE, ZH NOZZLE SIZE 1.0, .09332 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH10B?6/Rc 1 8?6/Rc 1 8?

This is a legacy product, and replaced byZH05BSA-06-06, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, AE, ZH NOZZLE SIZE 0.5, .05848 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH05B?6/Rc 1 8?6/Rc 1 8?

This is a legacy product, and replaced byZH10BSA-06-06, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, CE, ZH NOZZLE SIZE 1.0, .06269 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH10B?6/Rc 1 8?6/Rc 1 8?

This is a legacy product, and replaced byZH07BSA-06-06, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, BE, ZH NOZZLE SIZE 0.7, .05352 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH07B?6/Rc 1 8?6/Rc 1 8?

This is a legacy product, and replaced byZH07BLA-06-06, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, BE, ZH NOZZLE SIZE 0.7, .06746 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH07B?6/Rc 1 8?6/Rc 1 8?

This is a legacy product, and replaced byZH10DSA-06-06-08, VAC EJECTOR-BODY TYPE, VACUUM SERIES, ZH VACUUM EJECTOR, CE, ZH NOZZLE SIZE 1.0, .05934 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH10D?6/Rc 1 8?6/Rc 1 8?8/Rc 1 8

VQ5000

Note2) For thread standard, refer to page 2-6-39.

VZA2000

VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

4/5 Port Air Operated Valve SYJA3000 Series

20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (Piping port) 24 21 2 x 1.3 (Breathing port) 32 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 2 x 4.3 (For mounting) 37.5 4 2 x M5 x 0.8 (Pilot port)

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

LC6D/LC6C

Power supply Teaching Box Positioning Driver 24VDC 10%, Max. 3.0A 28 patterns Number of position settings LC6C Setting with dedicated teaching box (LC5-1-T1-02) Position setting method Absolute and incremental moves Speed: 6 to 200mm/s (with lead screw lead of 12mm) Position control method Photo coupler input 24VDC, Max. 6mA Input signal capacity To power supply Photo coupler output Max.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Performance/Specifications General specifications LC5-1-T1-02 Part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.