High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

CC

Hz) 200 VAC (50/60 Hz) 24 VDC Other Air operated For the one without combined valve (0), solenoid valve does not come with.

MG

51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50

Floating Joint

60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16 20 24 27 27 33 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1146 Floating Joint: Standard Type JA Series Flange Type: JAF20 to JAF160 JAF20 to 40 x Center of sphere J J R JAF50 to 160 Center of sphere x R

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

3 Port Solenoid Valve Series VQ100 1

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

It is already built-in to the rectifier circuit. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

60 44 18 45 25 9 14 17.5 M8 x 1.25 18 16 20 M14 x 1.5 30 1/4 17 10 77 44 95 66 50 25 9 73 73 53 20 50 28 11 17 17 M10 x 1.5 20 22 22 M16 x 1.5 30 3/8 19 10 95 53 115 73 63 28 8 80 80 60 22.4 55 30 11 17 17 M10 x 1.5 22 20 25 M18 x 1.5 30 3/8 21 12 102 60 122 80 80 32 8 100 100 75 28 65 32 13 22 20 M12 x 1.75 26 26 29 M22 x 1.5 35 1/2 26 12 130 75 155 90 100 38 6.5 118 118 90 35.5 80 35 13

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

LEC-OM07605CN

[Hz] PB34 VRF12B 1 60 [Hz] PB35 VRF13B 1 0.15 PB36 VRF14B 1 0.15 PB56 VRF21B 2 30 [Hz] PB57 VRF22B 2 30 [Hz] PB58 VRF23B 2 0.05 PB59 VRF24B 2 0.05 7 18 7.

OMR0032

(30 10-3) = 2000 [pulses/s) Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] [Calculation example: Target position 2] Travel distance: 6 (30 10-6) = 200 [pulses] (in the reverse direction) Travel speed: 60 (30 10-3) = 2000 [pulses/s] Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] 61 - Step Data setting example Thrust Load mass

IR1000/2000/3000

) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa)

PF2A/PF2W

Refer to page 16-11-10. 16-11-28 25 Series PF2W Digital Flow Switch, High Temperature Fluid Type For Water Dimensions: Integrated Display Type for Water Internal circuit and wiring example to are terminal numbers. 74 120 Brown 1.6 23 60 Load 1 OUT1 Main circuit 4 Load Black OUT2 2 ZSE ISE 12 to 24 VDC FLOW SWITCH + U P White 3 SET 60 50 34 Blue PSE OUT2 OUT1 PF2W7T--27(-M) DOWN FOR WATER

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

CG5-S

20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 80 3/8 to 750 100 22 M26 x 1.5 60 40 37 41 60 90 30 29 20 71 16 110 M12 x 1.75 10 26 33 8 100 1/2 to 750 (mm) Bore size (mm) Trunnion bracket CD (shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

Vacuum Pad

Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L From the formula on the front matter 8, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR) According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.

REC

75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25