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Flame resistant molded coil material UL94 V-0 standard Coil size and weight reduced New compact coil reduces the size and weight of the valve Weight: 20% Compared to previous series (Class 3) } Volume: 15% Threaded assembly Simplifies maintenance Improved corrosion resistance Special materials introduced Improved corrosion resistance Bottom mounting threads Mounting bracket also available

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

Offset 3: Power supply connector Supplies power to the solenoid valve, the Output block, SI unit and the Input block. 2 30 28 26 24 22 16 0 4 6 4 2 0 6 20 18 4 2 0 4 0 4 0 Input No. Bit No.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UJ, NEW SY3000 MFLD, FITTING

11 10.6 26.5 TMH-07 TMH-09 TMH-08 TMH-10 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 15-9-13

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) 10 turns (8 turns Note 1)) Number

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

o uss cl63n liltrd an the supPly eurrent 4-wire: Input signal of 0-20(mA) Power supply ot l215(V) Current 4-wire: 0-20 mA Input impedance: 200(c,) quivalent 3 TheAir Filterand Nrist SeDaratorshould be maintained periodically.

SS5Y7 BASE MT 1/4, VALVE, SS5Y7 MANIFOLD SY7000, PJ, SS5Y7 BASE MT 1/4, 0.60627 lb

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

Temperature rise is reduced by supply of air. 2 Series MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR1-M5 Width across flats: 14 Width across flats: 7 (16.2) M5 x 0.8 14 5 21 34 (8) R1/8 M5 x 0.8 MQR2-M5 MQR4-M5 * 35 * 29 3 +0.1 0 M4 x 0.7 thread length 8 depth 10 5.5 2-M3 x 0.5 thread length 6 P.C.D.38 M5 x 0.8 thread length 10 0.03 * flange: MQR2-F (for

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 2-5.5 Mounting hole Pilot EXH. 177 2-1/4 3 1 9 23 Manual override (Non-locking)

-2No.PS-OMU0002CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0002CN-D () () () () -4No.PS-OMU0002CN-D () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMU0002CN-D * FG (35 N () () *() 6 33 () () DC(-)() () * -6No.PS-OMU0002CN-D ( ) () CE -550(5) * 1015 10 1% 2264 LCD * -7No.PS-OMU0002CN-D M5 ISE20A X M 3 ISE20A -0.100~1.000 Mpa Y ZSE20A 0.0~-101.0 kPa K ZSE20AF

CJ-CF006 CJ-CR006 6 6 8 11 5 8 6 M3 x 0.5 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 10 8 10 13 6 10 8 M4 x 0.7 29 18 2 9 40 22 32 12 8 4.5 3.1 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 16 10 12 15 7 12 10 M5 x 0.8 35 20 14 48 28 38 16 10 5.5 6.4 2.3 +0.048 0 6-3-11