80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

C95Series

. : K,nellc energy (J) M " Load walghl (kg) (Ex:ample) Load limit at rod end wnen air cylinder .1"63 IS actuated with max: actuallrtg speed SOOmm/s.

Brake mechanism added

K Neoprene cross 110C * Standard Stroke * Maximum ambient temperature for the rod boot itself.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

CL

CLQ Lock operation Type Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D MLGP N A Non-lube/Rubber bumper Non-lube/Air cushion RLQ Bore size Cylinder stroke (mm) 20 25 32 40 20 mm 25 mm 32 mm 40 mm With rod boot MLU Bore size (mm) Standard stroke (mm) Long stroke (mm) Without rod boot Nylon tarpaulin Heat resistant tarpaulin 20 Nil J K

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

XLAQ/XLDQ

S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--