Series 11-MXJ Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes 24 V 100 V Relay, PLC M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes 24 V Relay, PLC M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Copper-free Actuators

Plate cylinder Series M(D)U Technical Data Standard 2.4-2 20-MU SMUl 2.4-6 Double rod 20-MUW Precision cylinder Series MTS 4.11-6 Standard MTS SMTSl 4.11-6 With end lock MTSR 5.5-3 Copper-free Actuators SMC Actuator 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Y es Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication

Air Slide Table Series MXS

V 12 V Reed switch Solid state switch Relay, PLC Yes Grommet 24 V 5 V, 12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V Yes (NPN equivalent) Relay, PLC 24 V Grommet A93V A90V A93 A90 100 V 12 V 2-wire No 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VQ110-L-M5 36.6 30.2 Manual override 4.9 4.9 12.4 15 E 22.7(Mounting hole) 2.5 12 17 About 300 (In case of latching) (Lead wire length) About 300 (Lead wire length) Lead wire color : Red Lead wire color : Black In case of latching type In case of locking knob type 42 40.7 35.6 11 SMC VQ110 -*L 30.7 JAPAN (4.1) (5.9) 5 (5.9) 5 5 A P 7 3 M5 (M3) 8.5 4.9 4.9 30.2 36.6 ( ) : In case of M3 Dimensions

LZ-OM004xx

A [Tightening torque] L[]ZC[]5[] 6 Across flat 17 19.5 22 L[]ZC[]3[] 5 Across flat 10 10 12 Model no. B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5

VDW

PAX PB Flow Characteristics Water Air 12 (INN.C.) Orifice size (mm ) Port size 12 (INN.C.)

KB

12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

Compact Rotary Actuator

Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 12. Output operation of the solid state auto switch is not stable for 50 [ms] after powered ON.

CEx-OMP0016

Dispersion of Stopping Position 36 Chapter 12: Manual Operating Procedure 37 Chapter 13: Installation / Wiring 13-1. Installation of Cylinder 3839 13-2. Electrical Wiring 40 13-3.

Series MLGP

Plate mounting bolt 27 Spring pin 42 Gasket B 13 Guide bolt 40 28 Hexagon socket countersunk head screw 43 Steel ball 40,50 14 Bushing 50 to 100 29 Hexagon socket head cap screw 44 Plug 63 to 100 15 Bushing MLGPM 30 Dust cover holding bolt 18 - 11.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

V Solid state switch Reed switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit Z76 5 V Yes 24 V Grommet 2-wire Z73 Z80 100 V Relay, PLC 12 V No 100 V or less IC circuit Solid state auto switches marked with are produced upon receipt

VQ4000

Bottom piping Enclosure How to replace pilot valve ass'y (Voltage) Note 2) Refer to p.1.11-42 and p.1.11-43 for part no. of pilot valve ass'y Refer to p.1.11-3 for How to Replace.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

LZ-OM003xx

L[]ZB[]3 5 Across flat 10 10 12 21 L[]ZB[]5 6 Across flat 17 19.5 22 33 Model no. F When mounting the work to the rod end, clamp the end across flat for tightening so that not Model no. A [Tightening torque] L[]ZB[]3 8 14 Across f l at 13 21 L[]ZB[]5 10 22 Across f l at 21 33 Model no. B C D E L[]ZB[]5 M 10 x 1. 25 x 12 deep [24.5Nm ] L[]ZB[]3 M 6 x 1. 0 x 8 deep [5.2Nm ] Model no.