Return Filter

The warranty period of the product is 1 year in service or 1. The warranty period of the product is 1 year in service or 1.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

4 1/8 1/8 1/4 1/4 P, R port 1/8 Port size 1/8 1/8 6 one-touch fitting 1/8 1/8 A port C6 8 one-touch fitting C8 X port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35 0.35

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(11) PE port R 3 1 P (24) 9 2-Rc 1/4 1(P) port 2-Rc 1/4 2(R) port 21 10 41 L plug connector (L) DIN terminal (Y) 300 89 (Lead wire length) Indicator light Pg.7 92.5 Max. 10 54.5 <59.5> Indicator light 1 P 3 R Cover diameter 1.5 Cross section 0.23 mm2 Applicable cable O.D. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23

Digital Pressure Switch

Linearity 1%F.S. Analogue output Output impedance approx. 1 k Output current (rated pressure range) 4 to 20 mA 2.5%F.S. 2.4 to 20 mA Current output 3 2.5%F.S. Linearity 1%F.S.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 7) p: For thread type: NPT only Note 8) c: Combination available for options: E1, E2, E3, E4. 2 Series ARP20/30/40 Specifications ARP20(K) ARP30(K) ARP40(K) Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.2 MPa Max. operating pressure 0.7 MPa Ex.) ARP30-02BG For 0.4 MPa setting 0.005 to 0.4 MPa Set pressure range Note 1) Ex.)

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

1 y !2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

58

7 @0 t e o r !8 !4 !3@1 !2 w !1 Description Component Parts Component Parts Note Description Material No. Material Note No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Compact manifold regulator ARM5 Series

Semi-standard AP100 None 0.35 MPa setting Note) Nonrelieving Symbol Nil 1 2 3 Symbol Relieving type OUT IN 2 1 Note) A pressure gauge with a full span of 0.8 MPa is attached. IN 1 OUT 2 7.

Coolant valve

Reassembly Procedure 1)Insert cable gland (4), washer (5) and rubber seal (6) and housing (2) into cable (7) in order. Connect cable (7) to terminal block (3) and fix terminal block (3) to housing (2) in place.

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMS0001-B Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Body mounting reference plane (B dimension range)1 60 106 58 74 7 6H9 (+0.030 0 ) depth 7 L Cable length 250 86 (165) A (Table traveling distance)2 (86) 13 (3.1) (4) [(2)]4 [Origin]4 (90) [88]4 Stroke Origin3 88 [(90)]4 (90) 2 [(4)]4 65 24 61 (68) 8 31 Motor cable 68 M4 x 0.7 thread depth 8 (F.G. terminal) 53.8 8 Auto switch groove5 (1 row per side) 60 D x 150 (= E) B 6H9 (+0.030 0 ) depth

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0007 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

VCA

OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0016 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

IZx-OMR0035

Function 4-1. Name of Parts 8 1 2 3 4 5 6 7 No. Name Panel display Type Description 1 Power supply switch POWER Switch Turn the Ionizer on and off.

3 Port Solenoid Valve Series VQ100

screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.