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When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.

The surface may become hot depending on the energized condition; therefore, do not touch the solenoid valves. 13 A AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 5 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

When the fluid level goes below the Low level, ERR20 (Low fluid level alarm) will be triggered. 13 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13

44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side: Same) 11.5 19 9 20 4 x (Rc, NPT, G) 1/8 thread depth 6.5 (Piping port), (Opposite side: Same) 13

kg] Lead 4: LEY32C 60 Lead 8: LEY32B 30 Motorless 50 Lead 8: LEY32B 22 40 20 LAT 30 Lead 16: LEY32A 11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m 100 60 Lead 4: LEY40C 53 Horizontal work load [kg] 80 Vertical work load [kg] 40 Lead 4: LEY40C 60 Lead 8: LEY40B Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13

24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13

Vespel is a registered trademark of DuPont. 13 Delivery of sub-atmospheric pressure Single Stage Regulator for Ultra High Purity Series AP1100 For UHP gas delivery Sub-atmospheric to low positive pressure delivery Flow capacity : to 0.5 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AP11 S FV4 FV4 01 2PW

0.6 0.7 0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Magnet: Built-in Magnet, Mounting: Rod Flange, Tube Material: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 1100mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3.0m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Coil Scrapper

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 1100mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: LAPC (3.0m Cord Length, M8-3 Pin Connector), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MXS/MXJ GUIDED CYLINDER, H5, 20MM MXS CLEAN-ROOM, 2.94868 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, MXS/MXJ GUIDED CYLINDER, H5, 20MM MXS CLEAN-ROOM, 5.84224 lb

The MXQ precision slide is ideal for applications requiring closely held parallelism and perpendicular specifications. The table and bearing guide are integrated into one precisely machined part made of hardened stainless steel. This minimizes tolerance stack-up associated with multiple part assemblies, and affords height tolerances of +/-0.05mm. The bearing is a recirculating linear guide

Applications that call for precise movement ranging from 10-150mm * typically require a cylinder and a precision guide. The MXS accomplishes this by integrating a cross roller bearing with a guide and two small air cylinders for compact force generation. The MXS is available in six sizes each with set stroke lengths and is standard with auto switch capability. Stroke adjustments are available