High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CRQ2

(800) 258-9200-www.stevenengineering.com CRA1 With double shaft DD W D CRQ2 I K Auto switch MSQ b (10) Max. 2Rc 1/8 (Port size) H F MRQ (US) (UW) DCB Q BC 20M N BB BA BA G D A (AU)Max S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) Rotating angle A AU B BA BB Size BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

CE2 Finger options ML2B A B A B A B Basic type Tapped on upper and lower faces Tapped on all faces Using tapped holes in the body from bottom face C J G5-S CV Positioning pin holes allow for easy mounting.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

CE2 Finger options ML2B A B A B A B Basic type Tapped on upper and lower faces Tapped on all faces Using tapped holes in the body from bottom face C J G5-S CV Positioning pin holes allow for easy mounting.

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

(Except cushion seal) Cushion ring B Rolled steel Zinc chromated Part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Rotary Table

0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

CNS

Local Area: (800) 258-9200-www.stevenengineering.com C B AL A K F VA BN N N 4-J M H S + Stroke (For NPT port) ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 16 Up to 1000 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1000 50 47 161 245 1/2 3/8 128 136

MHL2

MHW2 19 MRHQ 8 25 43 Auto switch 9 Closed E 9 13 13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

39

19 R6 R6 Weight kg 0.6 0.7 0.8 Weight kg 0.6 0.7 0.8 NAAMS code ACA226M ACA227M ACA228M NAAMS code ACA256M ACA257M ACA258M A B C D E F G H I J A B C D E F G H I J Part no.

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

Cylinder

---J Nil --Without auto switch 9O---D-90(O.5m lead wire) B Nose mount I I I T.

MXW

24 84 (Plug: M-5P) Operating direction (B) (A) 7 10 13 10 13 6.5 A 14.8 30 7 24 A 15.8 Z 3 Cross section AA (N-1) x H G H 6 depth 4.5 5H9 +0.030 Bottom through-hole 3.3 NN-M4 x 0.7 thread depth 8 0 5H9 +0.030 depth 4.5 0 F E (mm) Model Z E F G H N J MXW8-25 157 55 48 47 32 3 64 MXW8-50 182 53 76 46 30 4 71 Note) Adjuster bolt (Y) shown in the section above is attached only on B type (with

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

RZQ

stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27 37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42

XM, XY

Valve side exhaust 493 XMH, XYH Series Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMH-16 XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF