10

Stations D side U side D side 5 4 3 2 1 Stations For size 1 VVX021S 4A N N N For size 2 VVX022S 4A For size 3 VVX023S 4A When mounting a blanking plate assembly, if the solenoid valve for the manifold is ozone resistant, (Seal material: FKM), please select FKM. 5 x Rc1/4 (Individual port) Seal material N F NBR FKM Enter the products part number in order, counting the 1st station from the

4/5 Port Air Operated Valve SYJA3000 Series

M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 1476 4/5 Port Air Operated Valve SYJA5000 Series SYA How to Order SYJA SYJA VZA A, B port size Bracket VFA One-touch fitting for 6 C6 One-touch fitting for 4 M5 x 0.8 C4 M5 With bracket F Nil Without bracket VFRA *The bracket is not mounted. *2 position single only VPA4 SYJA SYJA5 20 1 M5 Body ported VZA VTA SYJA5 40 2 Base mounted

KP/KPQ/KPG

1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS-D Thread type AS-T Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASP N ASN AQ ASV AK Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

IIIIIII

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2 23 a' 0 5 1 (13) 0 1 2 (3) 0 7 9 (20) 0 1 9 (4 8) 2 9 5 (75) 0 5 5 (14) o70 't7 8) 008 (21 o 7'l (18) 1 1 8 (30) U 0.08 in. (2 0 mm) T.T 0.1 2 in.

KA

(mm) <M5, M6> <M5, M6> A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

VCA

VN LVC LVA For manual override J2 LVH W T R N Z M LVD Manual override 16 LVQ 1 1 LQ L 2 2 2 2 LVN n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J3 P = K (Pitch) J1 TI/ TIL 2-1/2 (VCA30), 3/4 (VCA40) IN port (Front ported) PA PAX L Dimension (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41

AS-FG/ASD-FG

Stainless steel specification (SUS303) Port size Thread type M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Nil Metric thread (M5) Unified thread (10-32UNF) R(PT) NPT N Needle Valve/Flow Rate Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 07,08,09,10,11 05,06,07,08,09,10 05,06 01,03,04 03,04 AS321FG AS331FG AS421FG AS431FG 12,13 10,11 10,11,12 08,09 06,07

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch

VZA2000

2 x 2.8 Mounting hole Manual override (Non-locking) Manual override (Non-locking) 5 x M5 x 0.8 5 x M5 x 0.8 3 position closed center: VZA2321-M5 3 position exhaust center: VZA2421-M5 SYA SYJA VZA VFA Pilot port (A side) Mounting hole 2 x 2.8 VFRA Pilot port (B side) 2 x M5 x 0.8 VA 2 x 2.8 Mounting hole Manual override (Non-locking) 5 x M5 x 0.8 1755 Series VZA2000 Dimensions: Base Mounted

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size With One-touch fitting 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 Stainless steel specifications (SUS303) AS Thread type ASP Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230FG ASD330FG ASD430FG

1.1

Note 2) In placing an order of mechanical seal set (service parts), inform us of the complete model number and the production lot number of the product in use. 40 Technical Data C O N T E N T S M Magnet pump P. 195 Mechanical seal pump P. 194 N Non-return valve P. 195 NRTL (National Recognized Test Laboratories) P. 199 O Offset function P. 197 ON/OFF temperature control P. 197 Overload relay

VCA

For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n

F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Air Cylinder

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1