No more element replacement!

q A (43) OUT IN e e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53 DRAIN G1/4 Note Component Parts Dimensions (mm) A B Model Bore size (Nominal size B) No.

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

5 Port Air Operated Valve

2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3(EB) VPA VPA3 3 position closed center/exhaust center/pressure center t q Symbol 3 position closed center (A) 4 (B) 2 w 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 3 (EB) 5 (EA) 1

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

VDW Series

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

1 Magnet holder Steel Nickel plated @2 Electroless nickel plated Brass Plug !2 Replacement Parts: Seal Kit Contents Kit no. Bore size (mm) MXP6-PS 6 2 pieces each of no. !3 and !5 and 1 piece of no. !4 MXPJ6 No. Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

Multi-Axis Step Motor Controller

o q !

Slider Type/Ball Bushing Bearing

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ G $ /$+ + $' ))$& ,.0 MVGQM, MVGQL Common Dimensions 11 )7$ +$'& ()($ $ +6$ 11 ")'&)& +#$ 11 B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z 40 2 . . . . 2 .2 . 3 % 3 % 3 % . .. "$$+ ,-... 50 . . 2 . 2 . . . . .. 3. % 3. % 3. % . .. 63 . 2 . 2 . . . . . 2 3. % 3. % 3. % $ 8 + ++7$ 1)'/)$ $ '$1$&)$ +#$+ $ )' $ +)'&)& +#$+ 79 1$)'+ / '+)' ) +)$ $

Stainless Steel 316

Construction q w Material No.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !