Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

IS3000

Light ass'y for 24 VDC has 3 mA of current leakage.

Compact Guide Cylinder End Lock Type SeriesMGP

GB GC H HA J K L MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.6 32 25, 50, 75, 100 125, 150, 175 200, 250, 300 350, 400 91 69 16 12 10 54 14 10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Free flow Controlled flow Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Model Port size Weight (g) AS420-02 2,500 1/4 38 3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Coolant Valve Series SGH

External pilot solenoid 1 Y A G 1 T Z B1 10 2 1 70 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series y Port size t Thread type e Seal material 70 r Pressure range w Valve type 1 2 3 4 1 2 A B 10 15 20 25 SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

When [With lock] is selected, [With motor cover] cannot be selected. u Actuator cable length [m] y Actuator cable type i Controller type 8 8 A B C Nil 1 3 5 Without cable 1.5 3 5 Nil S R Nil 6N 6P 1N 1P Without cable Standard cable Robotic cable (Flexible cable) Without controller 10 LECP6 (Step data input type) NPN PNP NPN PNP LECP1 (Programless type) 15 20 The standard cable should be used

AS-R/AS-Q

Body size 06 6 07 1/4" 08 8 09 5/16" 10 10 11 3/8" 12 12 13 1/2" 2 1/4 standard 3 3/8 standard 4 1/2 standard With rapid supply and exhaust function For selecting applicable tubing O.D., refer to the model on page 9. Metric size and inch size types can be visually identied by the color of the release button.

AS-R/AS-Q

Body size 06 6 07 1/4" 08 8 09 5/16" 10 10 11 3/8" 12 12 13 1/2" 2 1/4 standard 3 3/8 standard 4 1/2 standard With rapid supply and exhaust function For selecting applicable tubing O.D., refer to the model on page 9. Metric size and inch size types can be visually identied by the color of the release button.

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.