High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

CNS

0.2 stroke 133 36 184 Up to 1400 1401 to 1600 612 0.2 stroke 141 45 204 Up to 1400 1401 to 1600 Not available with auto switches. 9-8-13 14 Series CNS Dimensions Rod side flange style (F): CNSF M Rc BQ plug with breathing hole BC element T GB GA (In the case of NPT port) FA 4-J 4-FD Rc BP Unlocking port 2-Rc P Cylinder port Width across flats KA GL GR G G MM Q D EA E FY BF V FT VA AL A

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw.

240

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 9) The power consumption (including the controller) is for when the actuator is operating.

Ionizer

Before piping this product, exercise caution to prevent particles, water drops, or oil contents from entering the piping. 25 45 30 55 Static Neutralization Equipment 40 65 50 75 Wiring/Piping Warning 1. Confirm if the power supply voltage is enough and that it is within the specifications before wiring.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

Series 10-, 21- AF-A Air Filter

45 45 45 Drain guide port size 1/8 1/4 1/4 1/4 1/4 1/4 10-: Fluorine grease Grease 21-: Lithium soap based grease 10-: Class 3 Cleanliness class (ISO class) 21-: Class 3 Note 1) Inlet side pressure: 0.5 MPa, Pressure drop: 0.05 MPa (Representative value).

Series AP3500

Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish + Passivation Elgiloy PCTFE (Option: Vespel) PCTFE Dimensions inch (mm) AP3500 1.37 (34.8) AP3550 1.46 (37.1) AP3540/3580 AP3540 3.49 (88.6) AP3550 3.28 (83.3) AP3580 3.17 (80.5) 0.44 (11.2) A B B 45

JXCx-OMT0030CN

CN1 CN2 RJ-45 LEC-CAP-X22 27 - No a) RJ45 8P TM21P-88P HIROSE b) M12 4pin HR24-8DJ4PE550A(73) HIROSE XS2G-D4 [] c) M12 4pin HR24-8DP4S300(73) HIROSE XS2C-D4 [] 28 - 82 CN1 CN1 (LEC) 120 1/4W OV CN1 No.

ML2B

Theoretical Output CE1 (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 98 161 251 CE2 0.8 0.7 343 563 879 0.6 294 483 754 0.5 245 402 628 0.4 196 322 502 0.3 147 241 377 Stroke Adjusting Unit Specifications 25 32 40 490 804 1256 392 ML2B 643 25 RB1007 5.9 7 1500 70 4.22 6.86 32 RB1412 19.6 12 1500 45 6.86 15.98 40 RB1412 19.6 12 1500 45 6.86 15.98 5 to 60 Applicable bore

Series CE1

51.5 59.5 83.5 86.5 90 D-F7BA, F7lW, F7lF, J79W 8.5 17.5 21.5 43.5 48.5 46 41.5 48 56 80 83 86.5 D-F7lWV 5 14 18 40 45 42.5 39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45

MGC

15.5 9.5Depth6 24 106 22 M6 X 1Depth10 13 11 84 M6 X 1Depth12 6.8 30 103 65 45 16.5 26.5 11Depth8 M8 X 1.25Depth14 120 27 13 15 89 75, 100 125, 150 200, 250 300 M6 X 1Depth12 6.8 35 118 70 50 16.5 26.5 11Depth8 M8 X 1.25Depth14 135 32 13 15 94 8.6 40 140 75 50 34.5 M10 X 1.5Depth18 22 M8 X 1.25Depth16 14Depth10 160 37 16 18 107 45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12

4/5 Port Air Operated Valve Series SYJA3000 1

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

Modular F.R.L. Unit

A B C D E F G H I Model How to Order VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 33 42 44 50 61 28 30 36 44 54 45 55 63 69 81 30 03 RZ F VHS 3-port valve for residual pressure release Caution 1. Consult P/A when a pressure switch and T type spacer are installed on the outlet of pressure release valve 2.

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.